发明申请
- 专利标题: Chipstack package and manufacturing method thereof
- 专利标题(中): Chipstack封装及其制造方法
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申请号: US12385855申请日: 2009-04-22
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公开(公告)号: US20090209063A1公开(公告)日: 2009-08-20
- 发明人: Kang-Wook Lee , Gu-Sung Kim , Dong-Hyeon Jang , Seung-Duk Baek , Jae-sik Chung
- 申请人: Kang-Wook Lee , Gu-Sung Kim , Dong-Hyeon Jang , Seung-Duk Baek , Jae-sik Chung
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 优先权: KR2003-0059166 20030826
- 主分类号: H01L21/50
- IPC分类号: H01L21/50 ; H01L21/768
摘要:
A method for manufacturing chip stack packages may include: providing at least two wafers, each wafer having a plurality of chips, and scribe lanes formed between and separating adjacent chips; forming a plurality of via holes in peripheral portions of the scribe lanes; forming connection vias by filling the via holes; establishing electrical connections between the chip pads and corresponding connection vias; removing material from the back sides of the wafers to form thinned wafers; separating the thinned wafers into individual chips by removing a central portion of each scribe lane; attaching a first plurality of individual chips to a test wafer; attaching a second plurality of individual chips to the first plurality of individual chips to form a plurality of chip stack structures; encapsulating the plurality of chip stack structures; and separating the plurality of chip stack structures to form individual chip stack packages.
公开/授权文献
- US07977156B2 Chipstack package and manufacturing method thereof 公开/授权日:2011-07-12
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