发明申请
US20090215206A1 System and method for controlling a semiconductor manufacturing process
审中-公开
用于控制半导体制造工艺的系统和方法
- 专利标题: System and method for controlling a semiconductor manufacturing process
- 专利标题(中): 用于控制半导体制造工艺的系统和方法
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申请号: US12071721申请日: 2008-02-26
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公开(公告)号: US20090215206A1公开(公告)日: 2009-08-27
- 发明人: Abeer Singhal , Christopher Gould , William Roberts
- 申请人: Abeer Singhal , Christopher Gould , William Roberts
- 申请人地址: US NC Cary
- 专利权人: QIMONDA NORTH AMERICA CORP
- 当前专利权人: QIMONDA NORTH AMERICA CORP
- 当前专利权人地址: US NC Cary
- 主分类号: H01L21/66
- IPC分类号: H01L21/66
摘要:
A semiconductor manufacture and testing device is provided, comprising: a process device configured to perform a semiconductor processing operation on a semiconductor wafer; a testing device configured to perform a testing operation on the semiconductor wafer and generate real-time testing metrics relating to the testing operation; a data storage element configured to store the real-time testing metrics as stored testing metrics; a control and dispatch element configured to receive the stored testing metrics and generate dispatch control signals based on the stored testing metrics and a set of evaluation rules; and a test routing element located between the process element and the testing element, and configured to route the semiconductor wafer either from the process element to the testing element or from the process element around the testing element, based the dispatch control signals.
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