发明申请
- 专利标题: Adjusting Apparatus of Gap Width and Method Thereof
- 专利标题(中): 间隙宽度调整装置及其方法
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申请号: US12407207申请日: 2009-03-19
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公开(公告)号: US20090221208A1公开(公告)日: 2009-09-03
- 发明人: Takeshi Kobayashi , Fumiaki Kunimoto , Nobuo Shimizu
- 申请人: Takeshi Kobayashi , Fumiaki Kunimoto , Nobuo Shimizu
- 优先权: JP2000-331429 20001030
- 主分类号: H01J9/26
- IPC分类号: H01J9/26
摘要:
Provided is an adjusting method of a gap width of a laminated body composed of a color filter substrate and a TFT array substrate. A decompression chamber acting as a closed space communicating with a vacuum pump is decompressed, while a pressurization chamber that includes a decompression chamber is pressurized by driving a compressor.
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