发明申请
- 专利标题： FLOATING SHEET MEASUREMENT APPARATUS AND METHOD
- 专利标题（中）： 浮动片测量装置和方法
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申请号： US12403200申请日： 2009-03-12
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公开(公告)号： US20090231597A1公开(公告)日： 2009-09-17
- 发明人: Christopher A. ROWLAND , Peter L. Kellerman , Frank Sinclair , Julian G. Blake , Nicholas P.T. Bateman
- 申请人： Christopher A. ROWLAND , Peter L. Kellerman , Frank Sinclair , Julian G. Blake , Nicholas P.T. Bateman
- 申请人地址： US MA Gloucester
- 专利权人： VARIAN SEMICONDUTOR EQUIPMENT ASSOCIATES, INC.
- 当前专利权人： VARIAN SEMICONDUTOR EQUIPMENT ASSOCIATES, INC.
- 当前专利权人地址： US MA Gloucester
- 主分类号： G01B11/02
- IPC分类号： G01B11/02
摘要：
A sheet measurement apparatus has a sheet disposed in a melt. The measurement system uses a beam to determine a dimension of the sheet. This dimension may be, for example, height or width. The beam may be, for example, collimated light, a laser, x-rays, or gamma rays. The production of the sheet may be altered based on the measurements.
公开/授权文献
- US08064071B2 Floating sheet measurement apparatus and method 公开/授权日：2011-11-22
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