发明申请
- 专利标题： Method of Manufacturing Stamper, and Stamper
- 专利标题（中）： 制造压模和压模的方法
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申请号： US12473071申请日： 2009-05-27
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公开(公告)号： US20090232928A1公开(公告)日： 2009-09-17
- 发明人: Shinobu Sugimura , Kaori Kimura , Takuya Shimada , Yoshiyuki Kamata , Masatoshi Sakurai
- 申请人： Shinobu Sugimura , Kaori Kimura , Takuya Shimada , Yoshiyuki Kamata , Masatoshi Sakurai
- 申请人地址： JP Tokyo
- 专利权人： KABUSHIKI KAISHA TOSHIBA
- 当前专利权人： KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2007-256161 20070928
- 主分类号： B29C43/00
- IPC分类号： B29C43/00 ; G03F7/20
摘要：
According to one embodiment, a method of manufacturing a stamper includes forming a conductive layer on a surface of a master having patterns of protrusions and recesses, forming an electroforming layer on the conductive layer, separating the electroforming layer and the conductive layer from the master to form a stamper to which the patterns of protrusions and recesses of the master are transferred, removing a resist left on the surface of the stamper, and etching the surface of the stamper with an acidic solution having a pH value of less than 3.
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