Invention Application
US20090237770A1 OPTICAL DEVICE INCLUDING GATE INSULATOR WITH MODULATED THICKNESS 有权
光学装置,包括具有调制厚度的门绝缘体

OPTICAL DEVICE INCLUDING GATE INSULATOR WITH MODULATED THICKNESS
Abstract:
Provided is an optical device with improved phase shift and propagation loss of light without decreasing the dynamic characteristics of the optical device. The optical device includes a first semiconductor layer which is doped with a first type of conductive impurities and has a uniform thickness; a gate insulating layer which has a ? shape and is formed on a portion of the first semiconductor layer and has a thin center portion; and a second semiconductor layer which covers an upper surface of the gate insulating layer and is doped with a second type of conductive impurities opposite to the first type of conductive type impurities.
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