发明申请
US20090240366A1 METHOD AND SYSTEM FOR DETECTION OF TOOL PERFORMANCE DEGRADATION AND MISMATCH
有权
用于检测工具性能降低和误差的方法和系统
- 专利标题: METHOD AND SYSTEM FOR DETECTION OF TOOL PERFORMANCE DEGRADATION AND MISMATCH
- 专利标题(中): 用于检测工具性能降低和误差的方法和系统
-
申请号: US12416018申请日: 2009-03-31
-
公开(公告)号: US20090240366A1公开(公告)日: 2009-09-24
- 发明人: Sanjeev Kaushal , Sukesh Janubhai Patel , Kenji Sugishima
- 申请人: Sanjeev Kaushal , Sukesh Janubhai Patel , Kenji Sugishima
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 主分类号: G06F17/00
- IPC分类号: G06F17/00 ; G06F15/18 ; G06N3/12 ; G06N7/00
摘要:
Autonomous biologically based learning tool system(s) and method(s) that the tool system(s) employs for learning and analysis of performance degradation and mismatch are provided. The autonomous biologically based learning tool system includes (a) one or more tool systems that perform a set of specific tasks or processes and generate assets and data related to the assets that characterize the various processes and associated tool performance; (b) an interaction manager that receives and formats the data, and (c) an autonomous learning system based on biological principles of learning. Objectively generated knowledge gleaned from synthetic or production data can be utilized to determine a mathematical relationship among a specific output variable and a set of associated influencing variables. The generated relationship facilitates assessment of performance degradation of a set of tools, and performance mismatch among tools therein.
公开/授权文献
信息查询