发明申请
US20090242426A1 Gas Sensor 审中-公开
气体传感器

Gas Sensor
摘要:
Presented is a gas sensor and method for detecting the quantity of a measurement gas contained in a gas mixture. The sensor includes a prechamber, a first pump device disposed in the prechamber configured to set the partial pressure of a free gas component of a detection gas to a predetermined value, and a measuring chamber separated from the prechamber by a diffusion barrier. The measuring chamber includes a detection device configured to determine the concentration of the detection gas. The sensor further includes an inlet chamber separated from the prechamber by a diffusion barrier, a second pump device disposed in the inlet chamber configured to set the partial pressure of the free gas component of the detection gas to a predetermined value, and a third pump device disposed in the measuring chamber and configured to set the partial pressure of the free gas component to a predetermined value.
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