发明申请
- 专利标题: MONOLITHICALLY INTEGRATED PHOTODETECTORS
- 专利标题(中): 单一集成的光电复印机
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申请号: US11591658申请日: 2006-11-01
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公开(公告)号: US20090242935A1公开(公告)日: 2009-10-01
- 发明人: Eugene A. Fitzgerald
- 申请人: Eugene A. Fitzgerald
- 申请人地址: US MA Cambridge
- 专利权人: Massachusetts Institute of Technology
- 当前专利权人: Massachusetts Institute of Technology
- 当前专利权人地址: US MA Cambridge
- 主分类号: H01L31/0336
- IPC分类号: H01L31/0336 ; H01L31/00
摘要:
Methods and structures for monolithically integrating monocrystalline silicon and monocrystalline non-silicon materials and devices are provided. In one structure, a monolithically integrated semiconductor device structure comprises a silicon substrate and a first monocrystalline semiconductor layer disposed over the silicon substrate, wherein the first monocrystalline semiconductor layer has a lattice constant different from a lattice constant of relaxed silicon. The structure further includes an insulating layer disposed over the first monocrystalline semiconductor layer in a first region and a monocrystalline silicon layer disposed over the insulating layer in the first region. The structure includes at least one silicon-based photodetector comprising an active region including at least a portion of the monocrystalline silicon layer. The structure also includes a second monocrystalline semiconductor layer disposed over at least a portion of the first monocrystalline semiconductor layer in a second region and absent from the first region, wherein the second monocrystalline semiconductor layer has a lattice constant different from the lattice constant of relaxed silicon. The structure includes at least one non-silicon photodetector comprising an active region including at least a portion of the second monocrystalline semiconductor layer.
公开/授权文献
- US07705370B2 Monolithically integrated photodetectors 公开/授权日:2010-04-27
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