Invention Application
US20090243003A1 MANUFACTURING METHOD OF A GAS SENSOR INTEGRATED ON A SEMICONDUCTOR SUBSTRATE
有权
集成在半导体基板上的气体传感器的制造方法
- Patent Title: MANUFACTURING METHOD OF A GAS SENSOR INTEGRATED ON A SEMICONDUCTOR SUBSTRATE
- Patent Title (中): 集成在半导体基板上的气体传感器的制造方法
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Application No.: US12413346Application Date: 2009-03-27
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Publication No.: US20090243003A1Publication Date: 2009-10-01
- Inventor: Crocifisso Marco Antonio Renna , Alessandro Auditore , Alessio Romano , Sebastiano Ravesi
- Applicant: Crocifisso Marco Antonio Renna , Alessandro Auditore , Alessio Romano , Sebastiano Ravesi
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Priority: ITMI2008A000532 20080328
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/28

Abstract:
A method manufactures a gas sensor integrated on a semiconductor substrate. The method includes: realizing a first plurality of openings in the semiconductor substrate; realizing a crystalline silicon membrane suspended on the semiconductor substrate, forming an insulating cavity buried in the substrate; realizing a second plurality of openings in the semiconductor substrate, so as to totally suspend on the semiconductor substrate the crystalline silicon membrane; realizing, through a thermal oxidation process of the totally suspended crystalline silicon membrane, a suspended dielectric membrane; realizing, through selective photolithography, a heating element; realizing, through selective photolithography, electrodes and a pair of electric contacts; and selectively realizing, above the electrodes, a sensitive element by compacting layers of metallic oxide through a sintering process generated in the gas sensor by connecting the electrodes to a voltage generator.
Public/Granted literature
- US08101448B2 Manufacturing method of a gas sensor integrated on a semiconductor substrate Public/Granted day:2012-01-24
Information query
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