发明申请
- 专利标题: Method of preventing premature drying
- 专利标题(中): 防止过早干燥的方法
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申请号: US11803501申请日: 2007-05-14
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公开(公告)号: US20090246372A1公开(公告)日: 2009-10-01
- 发明人: Seokmin Yun , Mark Wilcoxson
- 申请人: Seokmin Yun , Mark Wilcoxson
- 申请人地址: US CA Fremont
- 专利权人: LAM RESEARCH CORPORATION
- 当前专利权人: LAM RESEARCH CORPORATION
- 当前专利权人地址: US CA Fremont
- 主分类号: C23C16/00
- IPC分类号: C23C16/00
摘要:
An apparatus, system and method for preventing premature drying of a surface of a substrate between fabrication operations includes receiving a substrate for cleaning, performing wet cleaning operations to the surface of the substrate to remove contaminants and fabrication chemistries left behind during one or more fabrication operations from the surface of the substrate, identifying a saturated gas chemistry and applying the identified saturated gas chemistry in a transition region such that the surface of the substrate exposed to the saturated gas chemistry in the transition region retains the moisture thereby preventing the surface of the substrate from premature drying. The saturated gas chemistry is applied between two subsequent wet-cleaning operations.
公开/授权文献
- US08021512B2 Method of preventing premature drying 公开/授权日:2011-09-20