发明申请
- 专利标题： RAW MATERIAL FEEDING DEVICE AND FILM FORMATION SYSTEM
- 专利标题（中）： 原料进料装置和薄膜成型系统
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申请号： US12067714申请日： 2006-07-25
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公开(公告)号： US20090250006A1公开(公告)日： 2009-10-08
- 发明人: Hideaki Yamasaki , Yumiko Kawano
- 申请人： Hideaki Yamasaki , Yumiko Kawano
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 优先权： JP2005274470 20050921
- 国际申请： PCT/JP2006/314611 WO 20060725
- 主分类号： C23C16/54
- IPC分类号： C23C16/54
摘要：
A raw material feeding device for feeding a gaseous raw material formed by sublimating a solid raw material to a film formation system includes a raw material container for holding the solid raw material therein, a first heating unit placed at a first side of the container, a second heating unit placed at a second side thereof, the first temperature control unit for conducting a first process of controlling the first and the second heating unit to make the temperature of the first side higher than that of the second side to thereby sublimate the solid raw material disposed at the first side, and the second temperature control unit for conducting a second process of controlling the first and the second heating unit to make the temperature of the second side higher than that of the first side to thereby sublimate the solid raw material disposed at the second side.