发明申请
- 专利标题: PIXEL WITH ASYMMETRIC TRANSFER GATE CHANNEL DOPING
- 专利标题(中): 具有不对称传输门控通道的像素
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申请号: US12481056申请日: 2009-06-09
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公开(公告)号: US20090250734A1公开(公告)日: 2009-10-08
- 发明人: CHINTAMANI P. PALSULE , Changhoon Choi , Fredrick P. LaMaster , John H. Stanback , Thomas E. Dungan , Thomas Joy , Homayoon Haddad
- 申请人: CHINTAMANI P. PALSULE , Changhoon Choi , Fredrick P. LaMaster , John H. Stanback , Thomas E. Dungan , Thomas Joy , Homayoon Haddad
- 申请人地址: CY GRAND CAYMAN
- 专利权人: APTINA IMAGING CORPORATION
- 当前专利权人: APTINA IMAGING CORPORATION
- 当前专利权人地址: CY GRAND CAYMAN
- 主分类号: H01L31/06
- IPC分类号: H01L31/06
摘要:
A pixel including a substrate of a first conductivity type and having a surface, a photodetector of a second conductivity type that is opposite the first conductivity type, a floating diffusion region of the second conductivity type, a transfer region between the photodetector and the floating diffusion, a gate positioned above the transfer region and partially overlapping the photodetector, and a pinning layer of the first conductivity type extending at least across the photodetector from the gate. A channel implant of the first conductivity type extending from between a midpoint of the transfer gate and the floating diffusion to at least across the photodiode and having a dopant concentration such that a dopant concentration of the transfer region is greater proximate to the photodetector than the floating diffusion, and wherein a peak dopant concentration of the channel implant is at a level and at a depth below the surface such that a partially-buried channel is formed in the transfer region between the photodiode and floating diffusion when the transfer gate is energized.
公开/授权文献
- US07834383B2 Pixel with asymmetric transfer gate channel doping 公开/授权日:2010-11-16
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