发明申请
US20090264052A1 Polishing method and polishing apparatus, and program for controlling polishing apparatus
有权
抛光方法和抛光装置,以及用于控制抛光装置的程序
- 专利标题: Polishing method and polishing apparatus, and program for controlling polishing apparatus
- 专利标题(中): 抛光方法和抛光装置,以及用于控制抛光装置的程序
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申请号: US11991064申请日: 2006-09-12
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公开(公告)号: US20090264052A1公开(公告)日: 2009-10-22
- 发明人: Tsuneo Torikoshi , Kuniaki Yamaguchi
- 申请人: Tsuneo Torikoshi , Kuniaki Yamaguchi
- 优先权: JP2005-269843 20050916
- 国际申请: PCT/JP2006/318461 WO 20060912
- 主分类号: B24B1/00
- IPC分类号: B24B1/00 ; B24B37/00 ; B24B53/02
摘要:
A polishing method can bring a polishing surface to the optimum condition for polishing, without using a dummy wafer or the like, before resuming polishing, thereby eliminating the cost of dummy wafer or the like. The polishing method comprises: carrying out a stand-by operation during a polishing-resting time period; carrying out a preparatory process to polishing, after completion of the stand-by operation, by dressing a polishing surface while supplying a polishing liquid to the polishing surface; and starting polishing of a workpiece after completion of the preparatory process to polishing. Determination as to whether to carry out the preparatory process to polishing after completion of the stand-by operation may be made based on the total operating time of the stand-by operation or the total effective number of the stand-by operations.
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