发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US12424119申请日: 2009-04-15
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公开(公告)号: US20090267144A1公开(公告)日: 2009-10-29
- 发明人: Yasushi KOBAYASHI , Manabu Imahashi
- 申请人: Yasushi KOBAYASHI , Manabu Imahashi
- 优先权: JP2008-116953 20080428
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/336
摘要:
A semiconductor device includes: an n-type first well diffusion layer; an n-type second well diffusion layer; a p-type source diffusion layer; a p-type third well diffusion layer; a p-type drain diffusion layer; a gate insulating film; a gate electrode; a device isolation insulating film; and a buffer layer. The buffer layer is formed between the first well diffusion layer and the third well diffusion layer to be in contact with an end of the third well diffusion layer opposing the source diffusion layer, and extends from immediately below the gate insulating film to a position deeper than a peak of curvature of impurity concentration distribution of the third well diffusion layer. The buffer layer has an impurity concentration lower than an impurity concentration in the third well diffusion layer.
公开/授权文献
- US07932558B2 Semiconductor device and method for manufacturing the same 公开/授权日:2011-04-26
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