发明申请
US20090267161A1 INCREASING BODY DOPANT UNIFORMITY IN MULTI-GATE TRANSISTOR DEVICES
有权
在多栅极晶体管器件中增加身体钆的均匀性
- 专利标题: INCREASING BODY DOPANT UNIFORMITY IN MULTI-GATE TRANSISTOR DEVICES
- 专利标题(中): 在多栅极晶体管器件中增加身体钆的均匀性
-
申请号: US12111714申请日: 2008-04-29
-
公开(公告)号: US20090267161A1公开(公告)日: 2009-10-29
- 发明人: Ravi Pillarisetty , Jack T. Kavalieros , Titash Rakshit , Gilbert Dewey , Willy Rachmady
- 申请人: Ravi Pillarisetty , Jack T. Kavalieros , Titash Rakshit , Gilbert Dewey , Willy Rachmady
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L21/336
摘要:
Techniques and structures for increasing body dopant uniformity in multi-gate transistor devices are generally described. In one example, an electronic device includes a semiconductor substrate, a multi-gate fin coupled with the semiconductor substrate, the multi-gate fin comprising a source region, a drain region, and a gate region wherein the gate region is disposed between the source region and the drain region, the gate region being body-doped after a sacrificial gate structure is removed from the multi-gate fin and before a subsequent gate structure is formed, a dielectric material coupled with the source region and the drain region of the multi-gate fin, and the subsequent gate structure coupled to the gate region of the multi-gate fin.
公开/授权文献
信息查询
IPC分类: