Invention Application
- Patent Title: SURFACE ACOUSTIC WAVE SENSOR
- Patent Title (中): 表面声波传感器
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Application No.: US12505571Application Date: 2009-07-20
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Publication No.: US20090272193A1Publication Date: 2009-11-05
- Inventor: Kenjiro OKAGUCHI , Michio KADOTA , Koji FUJIMOTO
- Applicant: Kenjiro OKAGUCHI , Michio KADOTA , Koji FUJIMOTO
- Applicant Address: JP Nagaokakyo-shi
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo-shi
- Priority: JP2007-038064 20070219
- Main IPC: G01N29/036
- IPC: G01N29/036 ; H01L41/04

Abstract:
A surface acoustic wave sensor detects a mass load on a resonator-type surface acoustic wave filter on the basis of a change in frequency and includes an IDT electrode arranged on a piezoelectric substrate to excite surface waves, an insulating film arranged so as to cover the IDT electrode, and a reaction film which is disposed on the insulating film and which reacts with a target substance to be detected or a binding substance that binds to a target substance to be detected. The reaction film is composed of a metal or a metal oxide.
Public/Granted literature
- US08156814B2 Surface acoustic wave sensor Public/Granted day:2012-04-17
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