Invention Application
US20090272193A1 SURFACE ACOUSTIC WAVE SENSOR 有权
表面声波传感器

SURFACE ACOUSTIC WAVE SENSOR
Abstract:
A surface acoustic wave sensor detects a mass load on a resonator-type surface acoustic wave filter on the basis of a change in frequency and includes an IDT electrode arranged on a piezoelectric substrate to excite surface waves, an insulating film arranged so as to cover the IDT electrode, and a reaction film which is disposed on the insulating film and which reacts with a target substance to be detected or a binding substance that binds to a target substance to be detected. The reaction film is composed of a metal or a metal oxide.
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