发明申请
- 专利标题: METHOD OF MANUFACTURING POLYSILICON THIN FILM AND METHOD OF MANUFACTURING THIN FILM TRANSISTOR HAVING THE SAME
- 专利标题(中): 制造多晶硅薄膜的方法及其制造薄膜薄膜晶体管的方法
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申请号: US12490236申请日: 2009-06-23
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公开(公告)号: US20090275178A1公开(公告)日: 2009-11-05
- 发明人: Se-Jin CHUNG , Chi-Woo Kim , Ui-Jin Chung , Dong-Byum Kim
- 申请人: Se-Jin CHUNG , Chi-Woo Kim , Ui-Jin Chung , Dong-Byum Kim
- 优先权: KR2005-28628 20050604; KR2005-28629 20050604; KR2005-28632 20050604
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/268
摘要:
In a method of manufacturing a polysilicon thin film and a method of manufacturing a TFT having the thin film, a laser beam is irradiated on a portion of an amorphous silicon thin film to liquefy the portion of the amorphous silicon thin film. The amorphous silicon thin film is on a first end portion of a substrate. The liquefied silicon is crystallized to form silicon grains. The laser beam is shifted from the first end portion towards a second end portion of the substrate opposite the first end portion by an interval in a first direction. The laser beam is then irradiated onto a portion of the amorphous silicon thin film adjacent to the silicon grains to form a first polysilicon thin film. Therefore, electrical characteristics of the amorphous silicon thin film may be improved.
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