发明申请
- 专利标题: LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
- 专利标题(中): 激光加工设备和激光加工方法
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申请号: US12464505申请日: 2009-05-12
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公开(公告)号: US20090277885A1公开(公告)日: 2009-11-12
- 发明人: Kazuo NAKAMAE , Motoki KAKUI , Shinobu TAMAOKI
- 申请人: Kazuo NAKAMAE , Motoki KAKUI , Shinobu TAMAOKI
- 申请人地址: JP Osaka-shi
- 专利权人: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- 当前专利权人: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- 当前专利权人地址: JP Osaka-shi
- 优先权: JPP2008-124990 20080512
- 主分类号: B23K26/04
- IPC分类号: B23K26/04
摘要:
The present invention relates to a laser processing apparatus having a structure for effectively processing of objects by condensing a laser beam, and a laser processing method. A laser processing apparatus comprises a common mount surface on which plural objects are disposed in an array, a light source, a lens the reflection direction of which is changeable, and a condensing direction modifier. A laser beam from the light source arrives at the lens through a galvano-mirror. Herein, the galvano-mirror is arranged such that the reflection position thereof agrees with the front focal position of the lens. As the galvano-mirror reflects a laser beam toward the lens while the reflection direction is changed, the arriving position of the laser beam is scanned on the entrance surface of the lens. The condensing direction modifier modifies, according to the irradiation position of the laser beam arrived from the lens, an exit direction of the laser beam.
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