发明申请
- 专利标题: METHOD OF CUTTING SINGLE CRYSTALS
- 专利标题(中): 切割单晶的方法
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申请号: US12271245申请日: 2008-11-14
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公开(公告)号: US20090283761A1公开(公告)日: 2009-11-19
- 发明人: Ralf HAMMER , Manfred Jurisch
- 申请人: Ralf HAMMER , Manfred Jurisch
- 专利权人: FREIBERGER COMPOUND MATERIALS GmbH
- 当前专利权人: FREIBERGER COMPOUND MATERIALS GmbH
- 优先权: DE102007056115.8 20071115
- 主分类号: H01L29/24
- IPC分类号: H01L29/24 ; C30B29/42 ; C30B29/44 ; C30B29/06 ; C30B29/40 ; C30B29/00 ; C30B29/36 ; C30B29/20 ; C30B29/38 ; B32B3/10 ; B32B9/00 ; B32B15/20 ; H01L29/20 ; H01L29/26 ; H01L29/161 ; H01L29/04 ; B28D5/00 ; B26F3/00
摘要:
A method of dividing single crystals, particularly of plates of parts thereof, is proposed, which can comprise: pre-adjusting the crystallographic cleavage plane (2′) relative to the cleavage device, setting a tensional intensity (K) by means of tensional fields (3′, 4′), determining an energy release rate G(α) in dependence from a possible deflection angle (α) from the cleavage plane (2′) upon crack propagation, controlling the tensional fields (3′, 4′) such that the crack further propagates in the single crystal, wherein G(0)≧2γe(0) and simultaneously at least one of the following conditions is satisfied: ∂ G ∂ α α = 0 ≤ 2 β e h if ∂ 2 G ∂ α 2 ≤ 0 or ( 2.1 ) ∂ G ∂ α ≤ 2 β e h ∀ α : α 1
公开/授权文献
- US08097080B2 Method of cutting single crystals 公开/授权日:2012-01-17
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