发明申请
- 专利标题: NON-CORROSIVE CHEMICAL RINSE SYSTEM
- 专利标题(中): 非腐蚀性化学冲击系统
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申请号: US11276728申请日: 2006-03-11
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公开(公告)号: US20090288688A1公开(公告)日: 2009-11-26
- 发明人: Ron Rulkens , Igor Ivanov , Mark Weise
- 申请人: Ron Rulkens , Igor Ivanov , Mark Weise
- 主分类号: B08B3/08
- IPC分类号: B08B3/08 ; C09K13/00
摘要:
A rinse system including providing a chemical rinse including a corrosion inhibitor, and rinsing a wafer with the chemical rinse reducing defects on silicon and a dielectric, and maintaining integrity of a metal.