发明申请
US20090293616A1 CAPACITIVE SENSOR WITH STRESS RELIEF THAT COMPENSATES FOR PACKAGE STRESS
有权
具有应力消耗的电容传感器，用于包装应力补偿
- 专利标题： CAPACITIVE SENSOR WITH STRESS RELIEF THAT COMPENSATES FOR PACKAGE STRESS
- 专利标题（中）： 具有应力消耗的电容传感器，用于包装应力补偿
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申请号： US12129548申请日： 2008-05-29
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公开(公告)号： US20090293616A1公开(公告)日： 2009-12-03
- 发明人: Yizhen Lin , Andrew C. McNeil
- 申请人： Yizhen Lin , Andrew C. McNeil
- 申请人地址： US TX Austin
- 专利权人： FREESCALE SEMICONDUCTOR, INC.
- 当前专利权人： FREESCALE SEMICONDUCTOR, INC.
- 当前专利权人地址： US TX Austin
- 主分类号： G01P15/125
- IPC分类号： G01P15/125
摘要：
A microelectromechanical systems (MEMS) capacitive sensor (52) includes a movable element (56) pivotable about a rotational axis (68) offset between ends (80, 84) thereof. A static conductive layer (58) is spaced away from the movable element (56) and includes electrode elements (62, 64). The movable element (56) includes a section (74) between the rotational axis (68) and one end (80) that exhibits a length (78). The movable element (56) further includes a section (76) between the rotational axis (68) and the other end (84) that exhibits a length (82) that is less than the length (78) of the section (74). The section (74) includes slots (88) extending through movable element (56) from the end (80) toward the rotational axis (68). The slots (88) provide stress relief in section (74) that compensates for package stress to improve sensor performance.
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