发明申请
- 专利标题： ARRANGEMENT FOR COATING A SUBSTRATE
- 专利标题（中）： 涂层基材的布置
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申请号： US12130118申请日： 2008-05-30
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公开(公告)号： US20090293810A1公开(公告)日： 2009-12-03
- 发明人: STEFAN BANGERT , Jose Manuel Dieguez-Campo , Michael Koenig , Nety M. Krishna , Byung-Sung Leo Kwak
- 申请人： STEFAN BANGERT , Jose Manuel Dieguez-Campo , Michael Koenig , Nety M. Krishna , Byung-Sung Leo Kwak
- 主分类号： C23C16/00
- IPC分类号： C23C16/00
摘要：
The invention relates to an arrangement for coating a substrate (4) by means of a vapor distributor (3). This vapor distributor (3) is connected with a vaporizer crucible (7) via an inlet (5). At least one valve (13) is disposed between the crucible (7) and the inlet (5). The vaporizer crucible (7) is located in a chamber (12) which can be evacuated or flooded by means of a vacuum valve (11).
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