发明申请
- 专利标题: HIGH FREQUENCY INTERCONNECT PAD STRUCTURE
- 专利标题(中): 高频互连接头结构
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申请号: US12130579申请日: 2008-05-30
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公开(公告)号: US20090294970A1公开(公告)日: 2009-12-03
- 发明人: Michael A. Stockinger , Kevin J. Hess , James W. Miller
- 申请人: Michael A. Stockinger , Kevin J. Hess , James W. Miller
- 主分类号: H01L23/538
- IPC分类号: H01L23/538
摘要:
An integrated circuit includes a high speed circuit, an interconnect pad, a passivation layer under the interconnect pad, a first patterned metal layer, and a first via. The high speed circuit is for a high speed signal at a terminal of the high speed circuit. The interconnect pad is on a top surface of the integrated circuit structure. The first patterned metal layer is under the passivation layer having a first portion and a second portion. The first portion of the first patterned metal layer is connected to the terminal of the high speed circuit. The second portion of the first patterned metal layer is under the interconnect pad and is electrically floating when the high frequency signal is present on the interconnect pad portion. The result is reduced capacitive loading on the high speed signal which improves performance.
公开/授权文献
- US08274146B2 High frequency interconnect pad structure 公开/授权日:2012-09-25
信息查询
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