Invention Application
- Patent Title: STRESS ENHANCED TRANSISTOR DEVICES AND METHODS OF MAKING
- Patent Title (中): 应力增强晶体管器件及其制造方法
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Application No.: US12136195Application Date: 2008-06-10
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Publication No.: US20090302348A1Publication Date: 2009-12-10
- Inventor: Thomas N. Adam , Judson R. Holt , Thomas A. Wallner
- Applicant: Thomas N. Adam , Judson R. Holt , Thomas A. Wallner
- Applicant Address: US NY ARMONK
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY ARMONK
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/78

Abstract:
Stress enhanced transistor devices and methods of fabricating the same are provided. In one embodiment, a transistor device comprises: a gate conductor disposed above a semiconductor substrate between a pair of dielectric spacers, wherein the semiconductor substrate comprises a channel region underneath the gate conductor and recessed regions on opposite sides of the channel region, wherein the recessed regions undercut the dielectric spacers to form undercut areas of the channel region; and epitaxial source and drain regions disposed in the recessed regions of the semiconductor substrate and extending laterally underneath the dielectric spacers into the undercut areas of the channel region.
Information query
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