发明申请
- 专利标题： Image Enhancement Technique
- 专利标题（中）： 图像增强技术
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申请号： US11918577申请日： 2005-04-15
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公开(公告)号： US20090303452A1公开(公告)日： 2009-12-10
- 发明人: Ulric Ljungblad
- 申请人： Ulric Ljungblad
- 申请人地址： SE Taby
- 专利权人： Micronic Laser Systems AB
- 当前专利权人： Micronic Laser Systems AB
- 当前专利权人地址： SE Taby
- 国际申请： PCT/SE2005/000543 WO 20050415
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G03B27/50
摘要：
The present invention relates to a method to improve at least one feature edge steepness in an image to be exposed onto a moving workpiece, comprising the actions of: moving the image in essentially the same direction relative to the direction of movement of the workpiece, synchronizing said moving of the image with a pulse length of an exposure radiation source. The invention also relates to a pattern generator for creating patterns on a workpiece