公开(公告)号：US07110159B2

公开(公告)日：2006-09-19

申请号：US11008566

申请日：2004-12-10

申请人： Ulric Ljungblad

发明人： Ulric Ljungblad

IPC分类号： G02B26/00

CPC分类号： G02B5/1871 ,  G02B26/0841 ,  G03F7/70283 ,  G03F7/70291

摘要： An apparatus for patterning a work piece including a source, and at least one reflective tilting surface adapted to induce a phase difference using at least one of a phase shifting plate and a difference in step height. A method corresponding to the apparatus for patterning a work piece. A method of manufacturing the apparatus for patterning a work piece and a Spatial Light Modulator, which may be included therein.

摘要翻译： 一种用于对包括源的工件进行图案化的装置，以及适于使用相移板中的至少一个和台阶高度中的至少一个来引起相位差的至少一个反射倾斜表面。 对应于用于图案化工件的装置的方法。 一种制造用于图案化工件的设备的方法和可以包括在其中的空间调光器。

公开(公告)号：US20050122558A1

公开(公告)日：2005-06-09

申请号：US10507554

申请日：2003-03-14

申请人： Ulric Ljungblad

发明人： Ulric Ljungblad

IPC分类号： G02B26/08 ,  G09G3/20 ,  G09G3/34 ,  G02F1/00 ,  G02B26/00

CPC分类号： G02B26/0841

摘要： The present invention relates to a method for modulating at least one pulse of electromagnetic radiation with a spatial light modulator. At least one mechanically movable modulator element is provided. At least one actuating element is provided capable to produce forces on said modulator element. An address signal to said at least one movable element is provided. A first amplifying signal is provided to at least one first electrode belonging to said at least one movable element shaping and timing said amplifying signal for creating a mechanical response in the modulator element representing a desired modulation state for said electromagnetic radiation pulse when impinging onto said modulator element.

摘要翻译： 本发明涉及用空间光调制器调制至少一个电磁辐射脉冲的方法。 提供至少一个机械可移动的调制器元件。 提供能够在所述调制器元件上产生力的至少一个致动元件。 提供到所述至少一个可移动元件的地址信号。 第一放大信号被提供给属于所述至少一个可移动元件整形的至少一个第一电极和定时所述放大信号，用于在调制器元件中产生表示当所述电磁辐射脉冲入射到所述调制器上时所述电磁辐射脉冲的期望调制状态的机械响应 元件。

公开(公告)号：US06885493B2

公开(公告)日：2005-04-26

申请号：US10467184

申请日：2002-01-28

申请人： Ulric Ljungblad ,  Hubert Karl Lakner ,  Peter Dürr

发明人： Ulric Ljungblad ,  Hubert Karl Lakner ,  Peter Dürr

IPC分类号： G02B26/08 ,  G02B26/00

CPC分类号： G02B26/0841

摘要： The present invention relates to a movable micro-element with reduced imprinting or hysteresis effect arranged spaced apart from a surface comprising at least one electrode. At least one restoring element is connected to said movable micro-element. An address electrode is arranged on said surface and capable to electrostatically attract said movable micro-element. Said address electrode is addressed to a first potential. Said movable micro-element is first set to a second potential defining a non addressed state and at a time period Δt before a predetermined pulsed signal is emitted said movable micro-element is switched from said second potential to a third potential defining an addressed state. Said movable micro-element is kept in said addressed state for a time period of Δt+Δt′. The invention also relates to a Spatial Light Modulator (SLM), an apparatus for patterning a workpiece and a method of reducing an imprinting or hysteresis effect of a movable micro-element.

摘要翻译： 本发明涉及与包括至少一个电极的表面间隔开的具有减小的压印或滞后效应的可移动微元件。 至少一个恢复元件连接到所述可移动微元件。 地址电极布置在所述表面上并且能够静电吸引所述可移动微元件。 所述寻址电极被寻址到第一电位。 所述可移动微元件首先被设置为限定非寻址状态的第二电位，并且在发射预定脉冲信号之前的时间段Deltat，所述可移动微元件从所述第二电位切换到限定寻址状态的第三电位。 所述可移动微元件在Deltat + Deltat'的一段时间内保持处于所述寻址状态。 本发明还涉及空间光调制器（SLM），用于图案化工件的装置和减小可移动微元件的压印或滞后效应的方法。

公开(公告)号：US20190039139A1

公开(公告)日：2019-02-07

申请号：US16157999

申请日：2018-10-11

申请人： Ulric Ljungblad

发明人： Ulric Ljungblad

IPC分类号： B22F3/105 ,  G01N21/95 ,  B29C64/153 ,  C22C38/00 ,  B32B15/01

摘要： A method for detecting defects in three-dimensional articles. Providing a model of said article. Providing a first powder layer on a substrate, directing an energy beam over said substrate causing said first powder layer to fuse in selected locations forming a first cross section of said three-dimensional article, providing a second powder layer on said substrate, directing the energy beam over said substrate causing said second powder layer to fuse in selected locations to form a second cross section of said three-dimensional article. A first and second image of a first and second fusion zone of said first powder layer respectively is captured. Comparing said first and second images with corresponding layers in said model. Detecting a defect in the three-dimensional article if a deviation in said first image with respect to said model is at least partially overlapping a deviation in said second image with respect to said model.

公开(公告)号：US07705965B2

公开(公告)日：2010-04-27

申请号：US11748667

申请日：2007-05-15

申请人： Per-Erik Gustafsson ,  Ulric Ljungblad

发明人： Per-Erik Gustafsson ,  Ulric Ljungblad

IPC分类号： G03B27/52 ,  G03B27/42 ,  G03B27/58

CPC分类号： G03F7/70341 ,  G03F1/54 ,  G03F1/76

摘要： The present disclosure relates to formation of latent images in a radiation sensitive layer applied to a substrate that is transparent to or transmissive of radiation at the exposing wavelength. In particular, it relates to so-called backside lithography, in which the final lens of an exposing system is positioned to project electromagnetic radiation through a first side of the transparent substrate and expose a radiation sensitive layer that overlays a second side of the transparent substrate that is opposite the first side. Five alternative embodiments for further treatment to form a radiation opaque layer corresponding to the latent image (the image or its inverse) are described. These methods and corresponding devices are useful for producing masks (sometimes called reticles), for producing latent images in semiconductor devices and for forming features of semiconductor devices using masks.

摘要翻译： 本公开涉及在施加到对曝光波长的辐射透明或透射的衬底上的辐射敏感层中的潜像的形成。 特别地，本发明涉及所谓的背面光刻技术，其中曝光系统的最终透镜被定位成将电磁辐射投影穿过透明基板的第一侧面，并且暴露出覆盖透明基板的第二面的辐射敏感层 这与第一面相反。 描述了用于进一步处理以形成对应于潜像（辐射不透明层）的替代实施例（图像或其倒数）。 这些方法和相应的装置可用于制造掩模（有时称为掩模版），用于在半导体器件中产生潜像并使用掩模形成半导体器件的特征。

公开(公告)号：US20090303452A1

公开(公告)日：2009-12-10

申请号：US11918577

申请日：2005-04-15

申请人： Ulric Ljungblad

发明人： Ulric Ljungblad

IPC分类号： G03F7/20 ,  G03B27/50

CPC分类号： G03F7/70725 ,  G03F7/70041

摘要： The present invention relates to a method to improve at least one feature edge steepness in an image to be exposed onto a moving workpiece, comprising the actions of: moving the image in essentially the same direction relative to the direction of movement of the workpiece, synchronizing said moving of the image with a pulse length of an exposure radiation source. The invention also relates to a pattern generator for creating patterns on a workpiece

摘要翻译： 本发明涉及一种改善要暴露在移动工件上的图像中的至少一个特征边缘陡度的方法，包括以下动作：相对于工件的移动方向沿基本相同的方向移动图像，同步 所述图像以曝光辐射源的脉冲长度移动。 本发明还涉及用于在工件上产生图案的图案发生器

公开(公告)号：US20060187517A1

公开(公告)日：2006-08-24

申请号：US11404340

申请日：2006-04-14

申请人： Ulric Ljungblad

发明人： Ulric Ljungblad

IPC分类号： G02B26/00

CPC分类号： G02B26/0841

摘要： The present invention relates to a method for modulating at least one pulse of electromagnetic radiation with a spatial light modulator. At least one mechanically movable modulator element is provided. At least one actuating element is provided capable to produce forces on said modulator element. An address signal to said at least one movable element is provided. A first amplifying signal is provided to at least one first electrode belonging to said at least one movable element shaping and timing said amplifying signal for creating a mechanical response in the modulator element representing a desired modulation state for said electromagnetic radiation pulse when impinging onto said modulator element.

摘要翻译： 本发明涉及用空间光调制器调制至少一个电磁辐射脉冲的方法。 提供至少一个机械可移动的调制器元件。 提供能够在所述调制器元件上产生力的至少一个致动元件。 提供到所述至少一个可移动元件的地址信号。 第一放大信号被提供给属于所述至少一个可移动元件整形的至少一个第一电极和定时所述放大信号，用于在调制器元件中产生表示当所述电磁辐射脉冲入射到所述调制器上时所述电磁辐射脉冲的期望调制状态的机械响应 元件。

公开(公告)号：US20190039140A1

公开(公告)日：2019-02-07

申请号：US16158069

申请日：2018-10-11

申请人： Ulric Ljungblad

发明人： Ulric Ljungblad

IPC分类号： B22F3/105 ,  B29C64/153 ,  G01N21/95 ,  C22C38/00 ,  B32B15/01

摘要： A method for detecting defects in three-dimensional articles. Providing a model of said article. Providing a first powder layer on a substrate, directing an energy beam over said substrate causing said first powder layer to fuse in selected locations forming a first cross section of said three-dimensional article, providing a second powder layer on said substrate, directing the energy beam over said substrate causing said second powder layer to fuse in selected locations to form a second cross section of said three-dimensional article. A first and second image of a first and second fusion zone of said first powder layer respectively is captured. Comparing said first and second images with corresponding layers in said model. Detecting a defect in the three-dimensional article if a deviation in said first image with respect to said model is at least partially overlapping a deviation in said second image with respect to said model.

公开(公告)号：US09399321B2

公开(公告)日：2016-07-26

申请号：US13318748

申请日：2009-07-15

申请人： Ulric Ljungblad

发明人： Ulric Ljungblad

IPC分类号： B22F3/105 ,  B29C67/00 ,  B22F3/00

CPC分类号： B23K26/342 ,  B22F3/004 ,  B22F3/1055 ,  B22F2003/1056 ,  B22F2003/1057 ,  B22F2998/00 ,  B22F2999/00 ,  B23K15/0013 ,  B23K15/0086 ,  B23K26/032 ,  B23K26/034 ,  B29C64/153 ,  B29C67/0077 ,  B33Y30/00 ,  B33Y50/02 ,  Y02P10/295 ,  B22F7/04 ,  B22F2207/15

摘要： The invention concerns a method for producing three-dimensional objects (6) layer by layer using a powdery material (7) which can be solidified by irradiating it with a high-energy beam (4), said method comprising the steps of: applying a first layer of powdery material onto a working area (5); solidifying a part of said first layer by irradiating it with a high-energy beam; and applying a second layer (8) of powdery material onto the first, partly solidified layer. The invention is characterized in that the method comprises the step of: determining a rate at which the temperature of the second layer (8) increases after application onto the first layer. The invention also concerns an apparatus configured to operate according to the above method.

摘要翻译： 本发明涉及一种使用粉末材料（7）逐层生产三维物体（6）的方法，其可以通过用高能束（4）照射而固化，所述方法包括以下步骤：施加 第一层粉状材料到工作区域（5）上; 通过用高能束照射来固化所述第一层的一部分; 以及将第二层（8）的粉末材料施加到所述第一部分固化的层上。 本发明的特征在于该方法包括以下步骤：确定施加到第一层上之后第二层（8）的温度升高的速率。 本发明还涉及一种被配置为根据上述方法操作的装置。

公开(公告)号：US09126167B2

公开(公告)日：2015-09-08

申请号：US14390978

申请日：2012-05-11

申请人： Ulric Ljungblad

发明人： Ulric Ljungblad

IPC分类号： B29C67/00 ,  B22F3/105 ,  B01J6/00 ,  B22F3/00 ,  B33Y10/00 ,  B33Y30/00

CPC分类号： B01J6/005 ,  B22F3/004 ,  B22F3/1055 ,  B22F2003/1056 ,  B29C64/00 ,  B29C64/153 ,  B29C64/20 ,  B29C67/0051 ,  B29C67/0077 ,  B29C67/0085 ,  B33Y10/00 ,  B33Y30/00 ,  Y02P10/295

摘要： An additive manufacturing method for forming a three-dimensional article through successive fusion of parts of at least one layer of a powder bed provided on a work table. Providing at least one rotatable powder container above said work table, said powder container comprising at least one exit for providing powder to a powder table arranged beside said work table, at least one opening inside said container is spatially separated from and connected to said at least one exit. Ejecting a fixed amount of powder from said powder container during at least one predetermined segment of rotational angles of said powder container, from the exit of said powder container onto said powder table, wherein said fixed amount is determined by the shape and size of the at least one opening inside said container. Distributing said powder onto said work table with a powder distributor.

摘要翻译： 一种用于通过连续融合设置在工作台上的至少一层粉末床层的部分来形成三维制品的添加剂制造方法。 在所述工作台上方提供至少一个可旋转的粉末容器，所述粉末容器包括至少一个用于将粉末提供给布置在所述工作台旁边的粉末工作台的出口，所述容器内的至少一个开口在空间上与所述至少一个 一个退出。 在所述粉末容器的至少一个预定转动角度的范围内，将所述粉末容器中的固定量的粉末从所述粉末容器的出口从所述粉末容器的出口排出到所述粉末表上，其中所述固定量由所述粉末容器的形状和尺寸确定 所述容器内的至少一个开口。 用粉末分配器将所述粉末分配到所述工作台上。