发明申请
- 专利标题: MANUFACTURING METHOD OF THREE-DIMENSIONAL STRUCTURE
- 专利标题(中): 三维结构的制造方法
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申请号: US12478298申请日: 2009-06-04
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公开(公告)号: US20090304928A1公开(公告)日: 2009-12-10
- 发明人: Taisuke Isano , Kosuke Asano , Yasushi Kaneda
- 申请人: Taisuke Isano , Kosuke Asano , Yasushi Kaneda
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-150482 20080609
- 主分类号: B05D5/00
- IPC分类号: B05D5/00
摘要:
A method for manufacturing a three-dimensional structure includes forming a first structure having a relief pattern on a substrate, forming a sacrifice layer on the first structure such that the sacrifice layer can be filled in a concave part of the first structure and the sacrifice layer can cover a surface of a convex part of the first structure on a side opposite to the substrate, forming a second structure having a relief pattern on the sacrifice layer, and a fourth step of removing the sacrifice layer from between the first structure and the second structure, and thereby bringing the second structure into contact with the surface of the first structure.
公开/授权文献
- US08309176B2 Manufacturing method of three-dimensional structure 公开/授权日:2012-11-13
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