公开(公告)号：US20090304928A1

公开(公告)日：2009-12-10

申请号：US12478298

申请日：2009-06-04

申请人： Taisuke Isano ,  Kosuke Asano ,  Yasushi Kaneda

发明人： Taisuke Isano ,  Kosuke Asano ,  Yasushi Kaneda

IPC分类号： B05D5/00

CPC分类号： B05D5/00 ,  B81C1/00126 ,  B81C2201/0108 ,  B81C2203/038

摘要： A method for manufacturing a three-dimensional structure includes forming a first structure having a relief pattern on a substrate, forming a sacrifice layer on the first structure such that the sacrifice layer can be filled in a concave part of the first structure and the sacrifice layer can cover a surface of a convex part of the first structure on a side opposite to the substrate, forming a second structure having a relief pattern on the sacrifice layer, and a fourth step of removing the sacrifice layer from between the first structure and the second structure, and thereby bringing the second structure into contact with the surface of the first structure.

摘要翻译： 一种制造三维结构的方法包括在基板上形成具有浮雕图案的第一结构，在第一结构上形成牺牲层，使得牺牲层可以填充在第一结构的凹部中，牺牲层 可以在与基板相对的一侧覆盖第一结构的凸部的表面，在牺牲层上形成具有浮雕图案的第二结构，以及从第一结构和第二结构之间移除牺牲层的第四步骤 结构，从而使第二结构与第一结构的表面接触。

公开(公告)号：US20060126699A1

公开(公告)日：2006-06-15

申请号：US11298425

申请日：2005-12-08

申请人： Yasushi Kaneda

发明人： Yasushi Kaneda

IPC分类号： H01S3/08

CPC分类号： G02B5/30 ,  G02B5/1809 ,  G02B5/1823 ,  G02B5/3058

摘要： Grating portions made of a metal are arranged as a first layer at regular intervals on a substrate, and a filling material fills the space between adjacent ones of the grating portions. Also, as a second layer, only grating portions are likewise arranged at regular intervals on the filling material. Structures each comprising grating portions of a great pitch P are stacked one upon the other to thereby cause them to function as a deflecting plate having a small apparent pitch.

摘要翻译： 由金属制成的光栅部分在衬底上以规则的间隔布置为第一层，并且填充材料填充相邻光栅部分之间的空间。 另外，作为第二层，只有光栅部分同样以规则的间隔布置在填充材料上。 每个包括大间距P的光栅部分的结构彼此堆叠，从而使它们用作具有较小视在间距的偏转板。

公开(公告)号：US06618218B1

公开(公告)日：2003-09-09

申请号：US09655342

申请日：2000-09-05

申请人： Hidejiro Kadowaki ,  Ko Ishizuka ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

发明人： Hidejiro Kadowaki ,  Ko Ishizuka ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

IPC分类号： G11B5596

CPC分类号： G11B5/59633

摘要： An apparatus for detecting the relative displacement of a surface to be detected, and an apparatus and method for recording information on a hard disc of a hard disk drive using such a detecting apparatus, the detecting apparatus comprising an interference optical system for condensing a light beam on the surface to be detected, and making the reflected light from the surface to be detected interfere with the condensed light beam to thereby form an interference light beam, light receiving means for receiving the interference light beam and outputting bright and dark signals attributable to the relative displacement of the surface to be detected, and condensed light information supplying means for separating part of the reflected light from the surface to be detected from the optical path until the reflected light arrives at said light receiving means, and utilizing the separated light beam to detect the condensed state of the incident light beam onto the surface to be detected or make the condensed state observable.

摘要翻译： 一种用于检测待检测表面的相对位移的装置，以及用于使用这种检测装置在硬盘驱动器的硬盘上记录信息的装置和方法，所述检测装置包括：干涉光学系统，用于将光束 在要检测的表面上，并且使来自被检测表面的反射光与聚光光束干涉，从而形成干涉光束;光接收装置，用于接收干涉光束并输出归因于 要被检测的表面的相对位移，以及聚光信息提供装置，用于从反射光到达所述光接收装置，将从所述光路的待检测表面反射的光的一部分分离，并将所分离的光束 将入射光束的凝聚状态检测到待检测或制作的表面上 浓缩态可观察。

公开(公告)号：US06259531B1

公开(公告)日：2001-07-10

申请号：US09333043

申请日：1999-06-15

申请人： Makoto Takamiya ,  Hidejiro Kadowaki ,  Kou Ishizuka ,  Yasushi Kaneda

发明人： Makoto Takamiya ,  Hidejiro Kadowaki ,  Kou Ishizuka ,  Yasushi Kaneda

IPC分类号： G01B902

CPC分类号： G01S17/58 ,  G01D5/34707 ,  G01P3/366

摘要： An apparatus for detecting the displacement information of an object has a light source, a diffraction grating for diffracting a light beam from the light source so that the light beam diffracted by the diffraction grating is incident on the object, and a photodetector for detecting the light from the object caused upon the incidence of the light beam thereon by the diffraction grating. Information regarding the relative displacement to the object along a predetermined direction is detected on the basis of a light detection signal from the photodetector. The diffraction grating is formed so that the light beam applied to the object may be condensed on the object in a direction in which the relative displacement to the object cannot be detected by the signal from the photodetector.

摘要翻译： 用于检测物体的位移信息的装置具有光源，用于衍射来自光源的光束的衍射光栅，使得被衍射光栅衍射的光束入射到物体上，以及用于检测光的光电检测器 由衍射光栅在其上的光束的入射引起的物体。 基于来自光电检测器的光检测信号来检测关于沿着预定方向到物体的相对位移的信息。 衍射光栅被形成为使得施加到物体的光束可以在物体上沿着与来自光电检测器的信号不能检测到物体的相对位移的方向上会聚在物体上。

公开(公告)号：US5742391A

公开(公告)日：1998-04-21

申请号：US579347

申请日：1995-12-27

申请人： Yasushi Kaneda ,  Kou Ishizuka ,  Kenji Hisamoto

发明人： Yasushi Kaneda ,  Kou Ishizuka ,  Kenji Hisamoto

IPC分类号： G01D5/30 ,  G01B11/00 ,  G01D5/36 ,  G01D5/38 ,  G01B9/02

CPC分类号： G01D5/38

摘要： An optical type sensor has a light emitting element, a light receiving element, at least one optical element acting on a light beam emitted from the light emitting element, in an optical path till the light beam enters the light receiving element, and a spacer member disposed to define a spacing between the light emitting element and/or the light receiving element and the at least one optical element, the spacer member having a structure for being mounted to other member.

摘要翻译： 光学型传感器具有发光元件，光接收元件，至少一个作用在从发光元件发射的光束上的光学元件，直到光束进入光接收元件的光路中，以及间隔元件 设置成限定发光元件和/或光接收元件与至少一个光学元件之间的间隔，间隔元件具有用于安装到其它元件的结构。

公开(公告)号：US5657125A

公开(公告)日：1997-08-12

申请号：US454501

申请日：1995-05-30

申请人： Shigeki Kato ,  Koh Ishizuka ,  Hiroshi Kondo ,  Satoshi Ishii ,  Yasushi Kaneda

发明人： Shigeki Kato ,  Koh Ishizuka ,  Hiroshi Kondo ,  Satoshi Ishii ,  Yasushi Kaneda

IPC分类号： G01D5/347 ,  G01D5/38 ,  G01B9/02

CPC分类号： G01D5/34715 ,  G01D5/38

摘要： An apparatus for detecting information relating to displacement of an object on which a grating scale is affixed. The apparatus includes a beam-emitting system for irradiating the grating scale with a beam. The apparatus also includes a light-detecting element having a light-receiving surface. A grating portion is integrally formed on at least a part of the light-receiving surface for detecting a beam from the grating scale which is irradiated by the beam from the beam-emitting system. Information relating to displacement of the object is detected on the basis of the detection by the grating portion of the light-detecting element.

摘要翻译： 一种用于检测与其上贴有光栅刻度的物体的位移相关的信息的装置。 该装置包括用于用光束照射光栅尺的光束发射系统。 该装置还包括具有光接收表面的光检测元件。 光栅部分整体地形成在光接收表面的至少一部分上，用于检测来自光栅尺的光束，该光束由来自光束发射系统的光束照射。 基于光检测元件的光栅部分的检测来检测与物体的位移有关的信息。

公开(公告)号：US5621527A

公开(公告)日：1997-04-15

申请号：US311854

申请日：1994-09-26

申请人： Yasushi Kaneda ,  Koh Ishizuka

发明人： Yasushi Kaneda ,  Koh Ishizuka

IPC分类号： G01B11/00 ,  G01D5/38 ,  G01B9/02

CPC分类号： G01D5/38

摘要： An apparatus for measuring the relative displacement information between it and a scale on which a diffraction grating is formed has a light source, a separating device for separating a light beam from the light source into a plurality of light beams, a wave combining device for wave-combining the diffracted lights of the plurality of light beams separated by the separating device which are diffracted by the diffraction grating, a light receiver for receiving the interfering lights by the plurality of light beams wave-combined by the wave combining device, the relative displacement information between the apparatus and the scale being measured by the light reception of the light receiver, and an optical device adapted to collimate the plurality of light beams or to form a spherical wave having so large a radius of curvature that it can be regarded as a plane wave of the plurality of light beams in the direction of light beam separation of the separating device and to condense the plurality of light beams in the optical path from the separating device to the wave combining device in a direction perpendicular to the direction of light beam separation.

摘要翻译： 用于测量其与其上形成有衍射光栅的标尺之间的相对位移信息的装置具有光源，用于将光束从光源分离成多个光束的分离装置，用于波的波合成装置 - 将由分离装置分离的由衍射光栅衍射的多个光束的衍射光组合在一起，用于通过由波合成装置波形组合的多个光束接收干扰光的光接收器，相对位移 通过光接收器的光接收来测量装置和刻度之间的信息，以及适于准直多个光束或形成具有如此大的曲率半径的球面波的光学装置，其可被认为是 在分离装置的光束分离的方向上的多个光束的平面波，并且冷凝平面 在从分离装置到波合成装置的光路中的光束在垂直于光束分离方向的方向上的光束。

公开(公告)号：US5574559A

公开(公告)日：1996-11-12

申请号：US608029

申请日：1996-02-28

申请人： Yasushi Kaneda ,  Koh Ishizuka ,  Hiroshi Kondo ,  Satoshi Ishii

发明人： Yasushi Kaneda ,  Koh Ishizuka ,  Hiroshi Kondo ,  Satoshi Ishii

IPC分类号： G01B11/00 ,  G01D5/38 ,  G01B9/02

CPC分类号： G01D5/38

摘要： A displacement detection apparatus has a light source 1, a first diffraction grating G1 for diffracting and dividing the light from the light source and applying O-order diffracted light and +1st-order diffracted light to a second diffraction grating G2, a third diffraction grating G3 for combining +1st-order reflected diffracted light created by the O-order diffracted light being reflected and diffracted by the second diffraction grating and -lst-order reflected diffracted light created by the +lst-order diffracted light being diffracted by the second diffraction grating, to thereby form interference light, and a light receiving element 3 for photoelectrically converting the interference light, the third diffraction grating including four diffraction gratings given a phase difference of .pi./2 each, the light receiving element being provided with light receiving portions 3a1, 3a2, 3b1 and 3b2 corresponding to the four diffraction gratings of the third diffraction grating, and cruciform light intercepting means is provided between adjacent ones of the light receiving portions.

摘要翻译： 位移检测装置具有光源1，用于衍射和分割来自光源的光并且将O级衍射光和+ 1级衍射光施加到第二衍射光栅G2的第一衍射光栅G1，第三衍射光栅 G3，用于组合由被第二衍射光栅反射和衍射的O级衍射光产生的+ 1阶反射衍射光，并且由被第二衍射衍射的+ 1级衍射光产生的一级反射衍射光 光栅，从而形成干涉光;以及用于光电转换干涉光的光接收元件3，第三衍射光栅包括四个衍射光栅，每个衍射光栅各自具有π/ 2的相位差，光接收元件设置有光接收部分3a1 ，3a2,3b1和3b2对应于第三衍射光栅的四个衍射光栅和十字形 在相邻的光接收部分之间提供遮光装置。

公开(公告)号：US5569913A

公开(公告)日：1996-10-29

申请号：US429236

申请日：1995-04-25

申请人： Koh Ishizuka ,  Yasushi Kaneda

发明人： Koh Ishizuka ,  Yasushi Kaneda

IPC分类号： G01B11/00 ,  G01D5/38 ,  H01J3/14

CPC分类号： G01D5/38

摘要： An apparatus for detecting a displacement of a diffraction grating set on a measured object, comprises a light-emitting device, a separation optical element for separating a beam from the light-emitting device into a plurality of beams, a multiplexing optical element for multiplexing light beams diffracted by the diffraction grating from two beams out of the plurality of beams, a first detecting unit for detecting interference light generated when the beams of diffracted light are multiplexed by the multiplexing optical element and outputting a signal related to relative displacement information to the diffraction grating, and a second detecting unit for outputting a signal related to different information from the relative displacement information to the diffraction grating, based on a change in a diffracted light quantity of diffracted light by the diffraction grating from another beam out of the plurality of beams and/or another diffracted light by the diffraction grating from the two beams.

摘要翻译： 一种用于检测设在被测物体上的衍射光栅的位移的装置，包括发光装置，用于将光束从发光装置分离为多个光束的分离光学元件，用于复用光的复用光学元件 由衍射光栅衍射的光束从多个光束中的两个光束衍射的光束;第一检测单元，用于检测当衍射光束被多路复用光学元件复用时产生的干涉光，并将与相对位移信息相关的信号输出到衍射 光栅和第二检测单元，用于基于衍射光栅从多个光束中的另一个光束衍射的光的衍射光量的变化，将与不同信息相关的信号从相对位移信息输出到衍射光栅 和/或来自t的衍射光栅的另一衍射光 wo梁。

公开(公告)号：US5537210A

公开(公告)日：1996-07-16

申请号：US258443

申请日：1994-06-09

申请人： Yasushi Kaneda ,  Koh Ishizuka ,  Satoshi Ishii ,  Kenji Hisamoto

发明人： Yasushi Kaneda ,  Koh Ishizuka ,  Satoshi Ishii ,  Kenji Hisamoto

IPC分类号： G01D5/38 ,  G01B11/02

CPC分类号： G01D5/38

摘要： A rotation detecting apparatus includes a grating portion provided on one of two objects for which relative rotation is to be detected, a light-emitting portion provided on the other of the two objects, and a light-receiving portion provided on the other object. The grating portion has at least one multi-helix diffraction grating. The light-receiving portion receives a beam emitted from the light-emitting portion and then traveling by way of the multi-helix diffraction grating. Information of relative rotation of the two objects is detected through light reception of the light-receiving portion.

摘要翻译： 旋转检测装置包括设置在要检测相对旋转的两个物体中的一个上的光栅部分，设置在两个物体中的另一个上的发光部分和设置在另一个物体上的光接收部分。 光栅部分具有至少一个多螺旋衍射光栅。 光接收部分接收从发光部分发射的光束，然后通过多螺旋衍射光栅行进。 通过光接收部分的光接收来检测两个物体的相对旋转的信息。