发明申请
US20090308316A1 Transfer apparatus and organic deposition device with the same 审中-公开
转移装置和有机沉积装置相同

  • 专利标题: Transfer apparatus and organic deposition device with the same
  • 专利标题(中): 转移装置和有机沉积装置相同
  • 申请号: US12318247
    申请日: 2008-12-23
  • 公开(公告)号: US20090308316A1
    公开(公告)日: 2009-12-17
  • 发明人: Jae-Wan Park
  • 申请人: Jae-Wan Park
  • 优先权: KR10-2008-0056254 20080616
  • 主分类号: C23C16/00
  • IPC分类号: C23C16/00
Transfer apparatus and organic deposition device with the same
摘要:
A transfer apparatus and an organic deposition device have the same capability of increasing stability under high-temperature and high-vacuum environments. The organic deposition device includes: a vacuum chamber; a stage installed in the vacuum chamber and having a substrate seated thereon; a deposition source for evaporating an organic toward the substrate; a process utility line coupled to the deposition source and drawn out to the exterior of the vacuum chamber; and a transfer apparatus for moving the deposition source in a direction parallel to a direction of the substrate, and having the process utility line installed therein.
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