发明申请
- 专利标题: Transfer apparatus and organic deposition device with the same
- 专利标题(中): 转移装置和有机沉积装置相同
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申请号: US12318247申请日: 2008-12-23
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公开(公告)号: US20090308316A1公开(公告)日: 2009-12-17
- 发明人: Jae-Wan Park
- 申请人: Jae-Wan Park
- 优先权: KR10-2008-0056254 20080616
- 主分类号: C23C16/00
- IPC分类号: C23C16/00
摘要:
A transfer apparatus and an organic deposition device have the same capability of increasing stability under high-temperature and high-vacuum environments. The organic deposition device includes: a vacuum chamber; a stage installed in the vacuum chamber and having a substrate seated thereon; a deposition source for evaporating an organic toward the substrate; a process utility line coupled to the deposition source and drawn out to the exterior of the vacuum chamber; and a transfer apparatus for moving the deposition source in a direction parallel to a direction of the substrate, and having the process utility line installed therein.
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