发明申请
US20090309176A1 METHODS FOR PROTECTING IMAGING ELEMENTS OF PHOTOIMAGERS DURING BACK SIDE PROCESSING, PHOTOIMAGERS AND SYSTEMS
有权
用于保护背面加工过程中光电子成像元件的方法,光电子和系统
- 专利标题: METHODS FOR PROTECTING IMAGING ELEMENTS OF PHOTOIMAGERS DURING BACK SIDE PROCESSING, PHOTOIMAGERS AND SYSTEMS
- 专利标题(中): 用于保护背面加工过程中光电子成像元件的方法,光电子和系统
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申请号: US12139068申请日: 2008-06-13
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公开(公告)号: US20090309176A1公开(公告)日: 2009-12-17
- 发明人: Salman Akram , Kyle K. Kirby
- 申请人: Salman Akram , Kyle K. Kirby
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 主分类号: H01L33/00
- IPC分类号: H01L33/00 ; H01L21/00
摘要:
Methods for processing photoimagers include forming one or more protective layers over the image sensing elements of a photoimager. Protective layers may facilitate thinning of the substrates of photoimagers, as well as prevent contamination of the image sensing elements and associated optical features during back side processing of the photoimagers. Blind vias, which extend from the back side of a photoimager to bond pads carried by an active surface of the photoimager, may be formed through the back side. The vias may be filled with conductive material and, optionally, redistribution circuitry may be fabricated over the back side of the photoimager. Photoimagers including features at result from such processes are also disclosed.
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