发明申请
- 专利标题: TAKE-UP TYPE VACUUM FILMING DEVICE
- 专利标题(中): 真空型真空成膜装置
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申请号: US12374675申请日: 2007-07-26
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公开(公告)号: US20090320747A1公开(公告)日: 2009-12-31
- 发明人: Nobuhiro Hayashi , Tomoharu Fujii , Isao Tada , Atsushi Nakatsuka
- 申请人: Nobuhiro Hayashi , Tomoharu Fujii , Isao Tada , Atsushi Nakatsuka
- 申请人地址: JP Kanagawa
- 专利权人: Ulvac, Inc.
- 当前专利权人: Ulvac, Inc.
- 当前专利权人地址: JP Kanagawa
- 优先权: JP2006-215259 20060808
- 国际申请: PCT/JP2007/064639 WO 20070726
- 主分类号: C23C14/56
- IPC分类号: C23C14/56
摘要:
[Object] To provide a roll-to-roll vacuum deposition apparatus capable of easily and speedily adjusting a pressing force between a printing roller and a backup roller.[Solving Means] In the present invention, by adjusting a pressing force between a printing roller and a backup roller through a relative movement of a mask forming unit including the printing roller and a transfer roller with respect to a vacuum chamber, individual adjustments of the printing roller and the transfer roller are eliminated and an adjustment of a pressing force on a unit basis is realized, thus achieving simplification of a structure, simplification and enhancement in precision of tasks, and a reduction in work time.
公开/授权文献
- US08333841B2 Roll-to-roll vacuum deposition apparatus 公开/授权日:2012-12-18
信息查询
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