发明申请
- 专利标题: Vertical-type non-volatile memory device
- 专利标题(中): 垂直型非易失性存储器件
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申请号: US12459148申请日: 2009-06-26
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公开(公告)号: US20090321816A1公开(公告)日: 2009-12-31
- 发明人: Yong-Hoon Son , Jong-Wook Lee , Jun Seo , Jong-Hyuk Kang
- 申请人: Yong-Hoon Son , Jong-Wook Lee , Jun Seo , Jong-Hyuk Kang
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2008-0061489 20080627
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; H01L27/088
摘要:
In a vertical-type non-volatile memory device, first and second single-crystalline semiconductor pillars are arranged to face each other on a substrate. Each of the first and second single-crystalline semiconductor pillars has a rectangular parallelepiped shape with first, second, third and fourth sidewalls. A first tunnel oxide layer, a first charge storage layer and a first blocking dielectric layer are sequentially stacked on the entire surface of the first sidewall of the first single-crystalline semiconductor pillar. A second tunnel oxide layer, a second charge storage layer and a second blocking dielectric layer are sequentially stacked on the entire surface of the first sidewall of the second single-crystalline semiconductor pillar. A word line makes contact with surfaces of both the first and second blocking dielectric layers. The word line is used in common for the first and second single-crystalline semiconductor pillars.
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