发明申请
- 专利标题: SUBSTRATE SUPPORTING UNIT AND SINGLE TYPE SUBSTRATE POLISHING APPARATUS USING THE SAME
- 专利标题(中): 基板支撑单元和单一基板抛光装置
-
申请号: US12273829申请日: 2008-11-19
-
公开(公告)号: US20090325469A1公开(公告)日: 2009-12-31
- 发明人: Gyo-Woog KOO , Chang-Ro Yoon , Jung-Gun Cho , Ki-Hoon Choi , Jung-Bong Choi , Duk-Hyun Son , Se-Hun Goo
- 申请人: Gyo-Woog KOO , Chang-Ro Yoon , Jung-Gun Cho , Ki-Hoon Choi , Jung-Bong Choi , Duk-Hyun Son , Se-Hun Goo
- 申请人地址: KR Chungcheongnam-do
- 专利权人: SEMES CO., Ltd.
- 当前专利权人: SEMES CO., Ltd.
- 当前专利权人地址: KR Chungcheongnam-do
- 优先权: KR2008-62444 20080630
- 主分类号: B24B1/00
- IPC分类号: B24B1/00 ; B24B7/04 ; B24B41/06
摘要:
Provided are a substrate supporting unit and a single type substrate polishing apparatus using the substrate supporting unit. During a polishing process, the bottom surface of a substrate is attached to the substrate supporting unit by vacuum suction, and during a post-cleaning process, the substrate is supported by the substrate supporting unit at a position spaced apart from the substrate supporting unit for cleaning the bottom surface of the substrate. Therefore, according to the substrate supporting unit and the substrate polishing apparatus using the substrate supporting unit, in a state where the substrate is supported by the single type substrate supporting unit, a process for polishing the top surface of the substrate and a post-process for cleaning the top and bottom surfaces of the substrate can be sequentially performed.
公开/授权文献
信息查询