发明申请
- 专利标题: TEMPERATURE REGULATING APPARATUS, EXPOSURE SYSTEM, AND DEVICE MANUFACTURING METHOD
- 专利标题(中): 温度调节装置,曝光系统和装置制造方法
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申请号: US12498264申请日: 2009-07-06
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公开(公告)号: US20100004796A1公开(公告)日: 2010-01-07
- 发明人: Yoshiyuki Okada , Tomohiko Yoshida , Takafumi Ota , Yuuhei Matsumura
- 申请人: Yoshiyuki Okada , Tomohiko Yoshida , Takafumi Ota , Yuuhei Matsumura
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-177406 20080707
- 主分类号: G05D23/00
- IPC分类号: G05D23/00
摘要:
A temperature regulating apparatus which regulates temperature includes a heater, a temperature detector configured to detect temperature, a calculator configured to calculate a manipulated value based on an error between a target temperature and the temperature detected by the temperature detector, and a power controller configured to supply power, having one of a voltage and current controlled in accordance with the manipulated value, to the heater. The calculator includes a first calculator having at least a proportional element of the proportional element, an integral element, and a derivative element, and a second calculator configured to calculate a square root. The first calculator and the second calculator are coupled in series with each other.