发明申请
- 专利标题： Substrate Support System Having a Plurality of Contact Lands
- 专利标题（中）： 具有多个联系地的基板支持系统
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申请号： US12548649申请日： 2009-08-27
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公开(公告)号： US20100007868A1公开(公告)日： 2010-01-14
- 发明人: Pawan Kumar Nimmakayala , Sidlgata V. Sreenivasan
- 申请人： Pawan Kumar Nimmakayala , Sidlgata V. Sreenivasan
- 申请人地址： US TX Austin
- 专利权人： BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
- 当前专利权人： BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
- 当前专利权人地址： US TX Austin
- 主分类号： G03B27/62
- IPC分类号： G03B27/62 ; G03B27/58
摘要：
The present invention includes a substrate support system having a chuck body. The chuck body includes a body surface with a pin extending therefrom having a contact surface lying in a plane. The pin may be movably coupled to the chuck body to move with respect to the plane. The pin may also include a cross-member having multiple contact lands.
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