发明申请
US20100008620A1 Optical Clock Signal Distribution Using Through-Silicon Vias 有权
使用透硅通孔的光时钟信号分配

Optical Clock Signal Distribution Using Through-Silicon Vias
摘要:
An integrated circuit structure includes a semiconductor chip including a front surface and a back surface; a via extending from the back surface of the semiconductor chip into the semiconductor chip, wherein the via is light transparent; and a photon detector in the semiconductor chip and exposed to the via.
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