发明申请
US20100019146A1 Specimen Holder, Specimen Inspection Apparatus, and Specimen Inspection Method
审中-公开
试样支架,试样检测装置和试样检验方法
- 专利标题: Specimen Holder, Specimen Inspection Apparatus, and Specimen Inspection Method
- 专利标题(中): 试样支架,试样检测装置和试样检验方法
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申请号: US12501011申请日: 2009-07-10
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公开(公告)号: US20100019146A1公开(公告)日: 2010-01-28
- 发明人: Hidetoshi Nishiyama , Mitsuru Koizumi , Mitsuo Suga
- 申请人: Hidetoshi Nishiyama , Mitsuru Koizumi , Mitsuo Suga
- 申请人地址: JP Tokyo
- 专利权人: JEOL LTD.
- 当前专利权人: JEOL LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-189574 20080723
- 主分类号: G01N23/225
- IPC分类号: G01N23/225
摘要:
Specimen holder, specimen inspection apparatus, and specimen inspection method for observing or inspecting a specimen consisting of cultured cells. The specimen holder has a body portion and a film. The body portion has a specimen-holding surface opened to permit access from the outside. The film has a first surface forming the specimen-holding surface. The specimen disposed on the first surface of the film can be irradiated with a primary beam for observation or inspection of the specimen via the film. A region coated with an electrically conductive film is formed on the bottom surface of the body portion facing away from the specimen-holding surface. An optically transparent region not coated with the electrically conductive film is also formed on the bottom surface.