发明申请
US20100019146A1 Specimen Holder, Specimen Inspection Apparatus, and Specimen Inspection Method 审中-公开
试样支架,试样检测装置和试样检验方法

Specimen Holder, Specimen Inspection Apparatus, and Specimen Inspection Method
摘要:
Specimen holder, specimen inspection apparatus, and specimen inspection method for observing or inspecting a specimen consisting of cultured cells. The specimen holder has a body portion and a film. The body portion has a specimen-holding surface opened to permit access from the outside. The film has a first surface forming the specimen-holding surface. The specimen disposed on the first surface of the film can be irradiated with a primary beam for observation or inspection of the specimen via the film. A region coated with an electrically conductive film is formed on the bottom surface of the body portion facing away from the specimen-holding surface. An optically transparent region not coated with the electrically conductive film is also formed on the bottom surface.
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