公开(公告)号：US07906760B2

公开(公告)日：2011-03-15

申请号：US12335143

申请日：2008-12-15

申请人： Hidetoshi Nishiyama ,  Mitsuo Suga ,  Mitsuru Koizumi

发明人： Hidetoshi Nishiyama ,  Mitsuo Suga ,  Mitsuru Koizumi

IPC分类号： H01J37/20

CPC分类号： G01N23/2202 ,  H01J37/228 ,  H01J2237/2004 ,  H01J2237/208 ,  H01J2237/2608 ,  H01J2237/2808

摘要： An electron microscope method for inspecting a liquid specimen and a reagent solution therefor. A culture medium and biological cells are put in the sample holder. A plugging agent is mixed into the liquid sample. The cells can be irradiated with a primary beam via a film. An image of the cells or information about the cells is obtained by detecting a resulting secondary signal. If the film is destroyed, the plugging agent plugs up the damaged portion of the film. Consequently, liquid leakage can be minimized.

摘要翻译： 用于检查液体试样的电子显微镜方法及其试剂溶液。 将培养基和生物细胞放入样品架中。 将堵塞剂混合到液体样品中。 细胞可以通过膜用初级束照射。 通过检测所得到的辅助信号来获得单元的图像或关于单元的信息。 如果胶片被破坏，则堵塞剂堵塞胶片的损坏部分。 因此，可以使液体泄漏最小化。

公开(公告)号：US07745802B2

公开(公告)日：2010-06-29

申请号：US12023443

申请日：2008-01-31

申请人： Hidetoshi Nishiyama ,  Mitsuru Koizumi

发明人： Hidetoshi Nishiyama ,  Mitsuru Koizumi

IPC分类号： G01N1/28 ,  G21K5/08 ,  H01J37/20

CPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/0266 ,  H01J2237/2004 ,  H01J2237/206 ,  H01J2237/2608 ,  H01J2237/2808

摘要： A specimen holder, a specimen inspection apparatus, and a specimen inspection method permitting a specimen consisting of cultured cells to be observed or inspected. Also, a method of fabricating the holder is offered. The holder has an open specimen-holding surface. At least a part of this surface is formed by a film. A specimen cultured on the specimen-holding surface of the film can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the cultured specimen (e.g., cells) can be observed or inspected in vitro. Especially, if an electron beam is used as the primary beam, the specimen in vitro can be observed or inspected by SEM. Because the specimen-holding surface is open, a manipulator can gain access to the specimen. A stimulus can be given to the specimen using the manipulator. The reaction can be observed or inspected.

摘要翻译： 试样支架，试样检查装置和允许观察或检查由培养细胞组成的试样的试样检查方法。 此外，提供了制造保持器的方法。 支架具有开放的标本保持表面。 该表面的至少一部分由膜形成。 可以在膜的试样保持表面上培养的样品通过膜通过主光束照射，用于观察或检查样品。 因此，可以在体外观察或检查培养的标本（例如细胞）。 特别地，如果使用电子束作为主光束，则可以通过SEM观察或检查体外的样本。 由于样品保持表面是开放的，操纵器可以进入样品。 可以使用机械手对试样给予刺激。 可以观察或检查反应。

公开(公告)号：US20090314955A1

公开(公告)日：2009-12-24

申请号：US12478111

申请日：2009-06-04

申请人： Hidetoshi Nishiyama ,  Mitsuru Koizumi ,  Mitsuo Suga

发明人： Hidetoshi Nishiyama ,  Mitsuru Koizumi ,  Mitsuo Suga

IPC分类号： G21K5/10 ,  G01N23/00

CPC分类号： G01N23/2204 ,  H01J37/20 ,  H01J37/228 ,  H01J37/28 ,  H01J2237/208 ,  H01J2237/2608 ,  H01J2237/2808

摘要： A specimen holder is offered which can reduce the amount of chemical sprayed over a specimen consisting of cultured cells. The specimen holder has an open specimen-holding surface. At least a part of the specimen-holding surface is formed by a film and a tapering portion formed around the film. The specimen can be cultured on the specimen-holding surface of the film. The presence of the tapering portion can reduce the amount of used reagent. The specimen can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the specimen, such as cells, can be well observed or inspected in vivo while the specimen is being cultured. Especially, if an electron beam is used as the primary beam, the specimen can be well observed or inspected in vivo by SEM (scanning electron microscopy).

摘要翻译： 提供样品架，可以减少由培养细胞组成的标本上喷洒的化学物质的量。 样品架具有开放的样品保持表面。 试样保持面的至少一部分由膜和形成在膜周围的锥形部分形成。 样品可以在膜的样品保持表面上培养。 锥形部分的存在可以减少使用的试剂的量。 样品可以通过膜通过初级光束照射，用于观察或检查样品。 因此，在培养样品时，可以在体内良好地观察或检查样品，例如细胞。 特别地，如果使用电子束作为主光束，则可以通过SEM（扫描电子显微镜）在体内良好地观察或检查样品。

公开(公告)号：US20090242762A1

公开(公告)日：2009-10-01

申请号：US12407918

申请日：2009-03-20

申请人： Hidetoshi Nishiyama ,  Mitsuru Koizumi

发明人： Hidetoshi Nishiyama ,  Mitsuru Koizumi

IPC分类号： G01N23/00

CPC分类号： G01N23/2251 ,  G01N23/2204 ,  G01N2223/307 ,  G01N2223/612 ,  G01N2223/637 ,  H01J37/20 ,  H01J37/228 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/182 ,  H01J2237/2004 ,  H01J2237/244 ,  H01J2237/2808

摘要： Method and apparatus have a film including a first surface to hold the liquid sample thereon, a vacuum chamber for reducing the pressure of an ambient in contact with a second surface of the film, primary beam irradiation means connected with the vacuum chamber and irradiating the sample with a primary beam via the film, signal detection means for detecting a secondary signal produced from the sample in response to the beam irradiation, a partitioning plate for partially partitioning off the space between the film and the primary beam irradiation means in the vacuum chamber, and a vacuum gauge for detecting the pressure inside the vacuum chamber.

摘要翻译： 方法和装置具有包括用于将液体样品保持在其上的第一表面的膜，用于降低与膜的第二表面接触的环境压力的真空室，与真空室连接并照射样品的主光束照射装置 通过胶片具有主光束，信号检测装置，用于响应于光束照射检测从样品产生的二次信号;分隔板，用于在真空室中部分地分隔膜和主光束照射装置之间的空间， 以及用于检测真空室内的压力的真空计。

公开(公告)号：US20080308731A1

公开(公告)日：2008-12-18

申请号：US12023443

申请日：2008-01-31

申请人： Hidetoshi Nishiyama ,  Mitsuru Koizumi

发明人： Hidetoshi Nishiyama ,  Mitsuru Koizumi

IPC分类号： G01N23/00 ,  G21K5/10

CPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/0266 ,  H01J2237/2004 ,  H01J2237/206 ,  H01J2237/2608 ,  H01J2237/2808

摘要： A specimen holder, a specimen inspection apparatus, and a specimen inspection method permitting a specimen consisting of cultured cells to be observed or inspected. Also, a method of fabricating the holder is offered. The holder has an open specimen-holding surface. At least a part of this surface is formed by a film. A specimen cultured on the specimen-holding surface of the film can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the cultured specimen (e.g., cells) can be observed or inspected in vitro. Especially, if an electron beam is used as the primary beam, the specimen in vitro can be observed or inspected by SEM. Because the specimen-holding surface is open, a manipulator can gain access to the specimen. A stimulus can be given to the specimen using the manipulator. The reaction can be observed or inspected.

摘要翻译： 试样支架，试样检查装置和允许观察或检查由培养细胞组成的试样的试样检查方法。 此外，提供了制造保持器的方法。 支架具有开放的标本保持表面。 该表面的至少一部分由膜形成。 可以在膜的试样保持表面上培养的样品通过膜通过主光束照射，用于观察或检查样品。 因此，可以在体外观察或检查培养的标本（例如细胞）。 特别地，如果使用电子束作为主光束，则可以通过SEM观察或检查体外的样本。 由于样品保持表面是开放的，操纵器可以进入样品。 可以使用机械手对试样给予刺激。 可以观察或检查反应。

公开(公告)号：US06737660B2

公开(公告)日：2004-05-18

申请号：US10372419

申请日：2003-02-24

申请人： Yoshihisa Miura ,  Yuichi Aki ,  Hiroshi Kawase ,  Masanobu Yamamoto ,  Naoki Date ,  Setsuo Norioka ,  Mitsuru Koizumi ,  Gakuo Komatsubara

发明人： Yoshihisa Miura ,  Yuichi Aki ,  Hiroshi Kawase ,  Masanobu Yamamoto ,  Naoki Date ,  Setsuo Norioka ,  Mitsuru Koizumi ,  Gakuo Komatsubara

IPC分类号： G11B910

CPC分类号： H01J37/18 ,  G11B7/261 ,  H01J37/305 ,  H01J37/3056 ,  H01J2237/162 ,  H01J2237/188

摘要： An electron beam irradiation apparatus in a partial vacuum method is structured with a static pressure floating pad 18 connected to a vacuum chamber 14 containing an electron beam column 15 and in a condition that the static pressure floating pad 18 is attached to a subject 1 to be irradiated without contacting, and an electron beam irradiating the subject 1 to be irradiated through an electron beam path 19 of the static pressure floating pad 18, whereby the vacuum chamber and the electron beam column can be maintained in the required degree of vacuum even in a condition that the static pressure floating pad 18 is separated from the subject 1 to be irradiated. A vacuum seal valve 30 including a piston to open and close the electron beam path 19 is provided within the static pressure floating pad 18. When the static pressure floating pad 18 is separated from the subject 1, the vacuum seal valve 30 is structured to be activated to close the electron beam path 19 so as to prevent the air from flowing into the vacuum chamber 14. In this structure, the vacuum seal valve 30 is formed with a round shaped cross section and in a tapered shape with a narrow tip so as to accomplish high vacuum seal without a gap, so that the degree of vacuum in the vacuum chamber and the electron beam column can surely be maintained.

摘要翻译： 部分真空法中的电子束照射装置由连接到包含电子束柱15的真空室14的静压浮动垫18构成，并且在将静压浮动垫18附着到被检体1的状态下 照射不经接触的电子束，以及通过静压浮动垫18的电子束路径19照射待被检体1的电子束，由此即使在真空室和电子束柱中也可以将真空室和电子束柱保持在所需的真空度 条件是静压浮动垫18与待照射的被检体1分离。 在静压浮动垫18内设置包括打开和关闭电子束通道19的活塞的真空密封阀30.当静压浮动垫18与被检体1分离时，真空密封阀30构成为 激活以闭合电子束路径19，以防止空气流入真空室14.在该结构中，真空密封阀30形成为圆形截面并具有窄尖端的锥形形状，以便 实现高真空密封而没有间隙，从而可以确保真空室和电子束柱中的真空度。

公开(公告)号：US06831278B2

公开(公告)日：2004-12-14

申请号：US10286442

申请日：2002-11-01

申请人： Masanobu Yamamoto ,  Hiroshi Kawase ,  Jun Sasaki ,  Minoru Takeda ,  Gakuo Komatsubara ,  Mitsuru Koizumi ,  Setsuo Norioka ,  Naoki Date

发明人： Masanobu Yamamoto ,  Hiroshi Kawase ,  Jun Sasaki ,  Minoru Takeda ,  Gakuo Komatsubara ,  Mitsuru Koizumi ,  Setsuo Norioka ,  Naoki Date

IPC分类号： H01J3720

CPC分类号： H01J37/18 ,  G11B7/261 ,  H01J37/20 ,  H01J2237/188 ,  H01J2237/3175

摘要： An electron beam irradiation system has a pumping block at an end of a microscope column of electron optics. The system has the rotary stage, the microscope column for directing an electron beam at the target on the rotary stage, the pumping block for evacuating air in the gap between the column and the target, a moving mechanism for sliding the rotary stage between a working position and a mounting position, and a cover member. In the working position, the target is opposite to the column. The cover member is brought into intimate contact with the rotary stage or target to prevent vacuum deterioration when the rotary stage moves from the working position to the mounting position.

摘要翻译： 电子束照射系统在电子光学显微镜柱的末端具有泵送块。 该系统具有旋转台，用于在旋转台上的目标处引导电子束的显微镜柱，用于在柱和靶之间的间隙中排空空气的泵送块，用于在工作期间将旋转台滑动的移动机构 位置和安装位置，以及盖构件。 在工作位置，目标与柱相反。 盖构件与旋转台或目标物紧密接触，以防止当旋转台从工作位置移动到安装位置时真空劣化。

公开(公告)号：US20100243888A1

公开(公告)日：2010-09-30

申请号：US12725816

申请日：2010-03-17

申请人： Hidetoshi Nishiyama ,  Mitsuru Koizumi ,  Mitsuo Suga

发明人： Hidetoshi Nishiyama ,  Mitsuru Koizumi ,  Mitsuo Suga

IPC分类号： G01N23/22 ,  H01J37/26

CPC分类号： H01J37/20 ,  H01J37/244 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2443 ,  H01J2237/24475

摘要： An inspection apparatus and method capable of well observing or inspecting a specimen contained in a liquid. The inspection apparatus has a film including first and second surfaces. Furthermore, the apparatus has a vacuum chamber for reducing the pressure in the ambient in contact with the second surface of the film, primary beam irradiation column connected with the vacuum chamber, and a shutter for partially partitioning the space between the film and the primary beam irradiation column within the vacuum chamber. A liquid sample is held on the first surface of the film. The primary beam irradiation column irradiates the sample. Backscattered electrons (a secondary beam) produced from the sample by the primary beam irradiation are directed at the shutter, producing secondary electrons (a tertiary signal).

摘要翻译： 能够良好地观察或检查包含在液体中的试样的检查装置和方法。 检查装置具有包括第一表面和第二表面的膜。 此外，该装置具有用于减小与膜的第二表面接触的环境中的压力的​​真空室，与真空室连接的主光束照射塔，以及用于部分地分隔膜和主光束之间的空间的遮板 真空室内的照射柱。 液体样品被保持在膜的第一表面上。 主光束照射列照射样品。 通过主光束照射由样品产生的后向散射电子（次级光束）指向快门，产生二次电子（第三信号）。

公开(公告)号：US20100051803A1

公开(公告)日：2010-03-04

申请号：US12546069

申请日：2009-08-24

申请人： Mitsuru Koizumi ,  Hidetoshi Nishiyama

发明人： Mitsuru Koizumi ,  Hidetoshi Nishiyama

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  H01J2237/022 ,  H01J2237/0268 ,  H01J2237/2004 ,  H01J2237/2608

摘要： A particle beam system is offered which can prevent contamination of the inside of the objective lens, the objective lens being located at the front end of the optical column. The particle beam system has an optical column equipped with a particle beam source for emitting a particle beam and a beam passage pipe through which the beam passes. The system further includes a vacuum chamber connected with the front end portion of the column. The beam passed through the pipe is released from the front end of the column. An inner pipe is detachably disposed inside the beam passage pipe located at the front-end side of the column.

摘要翻译： 提供一种粒子束系统，其可以防止物镜内部的污染，物镜位于光学柱的前端。 粒子束系统具有装备有用于发射粒子束的粒子束源和光束通过的射束通过管的光学柱。 该系统还包括与柱的前端部连接的真空室。 通过管道的梁从柱的前端释放。 内管可拆卸地设置在位于塔的前端侧的梁通道管内。

公开(公告)号：US08158937B2

公开(公告)日：2012-04-17

申请号：US12546069

申请日：2009-08-24

申请人： Mitsuru Koizumi ,  Hidetoshi Nishiyama

发明人： Mitsuru Koizumi ,  Hidetoshi Nishiyama

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  H01J2237/022 ,  H01J2237/0268 ,  H01J2237/2004 ,  H01J2237/2608

摘要： A particle beam system is offered which can prevent contamination of the inside of the objective lens, the objective lens being located at the front end of the optical column. The particle beam system has an optical column equipped with a particle beam source for emitting a particle beam and a beam passage pipe through which the beam passes. The system further includes a vacuum chamber connected with the front end portion of the column. The beam passed through the pipe is released from the front end of the column. An inner pipe is detachably disposed inside the beam passage pipe located at the front-end side of the column.

摘要翻译： 提供一种粒子束系统，其可以防止物镜内部的污染，物镜位于光学柱的前端。 粒子束系统具有装备有用于发射粒子束的粒子束源和光束通过的射束通过管的光学柱。 该系统还包括与柱的前端部连接的真空室。 通过管道的梁从柱的前端释放。 内管可拆卸地设置在位于塔的前端侧的梁通道管内。