发明申请
- 专利标题: METHOD OF MANUFACTURING SEMICONDUCTOR CHIP
- 专利标题(中): 制造半导体芯片的方法
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申请号: US12517632申请日: 2008-03-05
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公开(公告)号: US20100022071A1公开(公告)日: 2010-01-28
- 发明人: Kiyoshi Arita , Atsushi Harikai
- 申请人: Kiyoshi Arita , Atsushi Harikai
- 申请人地址: JP Osaka
- 专利权人: PANASONIC CORPORATION
- 当前专利权人: PANASONIC CORPORATION
- 当前专利权人地址: JP Osaka
- 优先权: JPP2007-059423 20070309
- 国际申请: PCT/JP2008/000455 WO 20080305
- 主分类号: H01L21/78
- IPC分类号: H01L21/78
摘要:
An object is to provide a semiconductor chip manufacturing method capable of removing test patterns in a higher efficiency in simple steps, while a general-purpose characteristic can be secured.In a method in which a semiconductor wafer 1 having integrated circuits 3 formed in a plurality of chip regions and test patterns 4 formed in scribe lines 2a is divided by a plasma etching process so as to manufacture individual semiconductor chips, laser light 5a is irradiated from the side of a circuit forming plane 1a so as to remove the test patterns 4; and thereafter, under such a condition that a circuit protection seat 6 is adhered onto a circuit forming plane 1a, a rear plane of the circuit forming plane 1a is mechanically thinned; a mask-purpose seat is adhered onto the rear plane 1b of the semiconductor wafer 1 after the plane thinning process; and then, a plasma dicing-purpose mask is work-processed by irradiating laser light. As a consequence, the semi-conductor wafer 1 can be held by employing one set of the circuit protection seat 6 from the thinning process up to the plasma dicing process.
公开/授权文献
- US07767554B2 Method of manufacturing semicondictor chip 公开/授权日:2010-08-03
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