发明申请
- 专利标题: Cooling of Actuator Coils
- 专利标题(中): 致动器线圈的冷却
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申请号: US12533888申请日: 2009-07-31
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公开(公告)号: US20100026974A1公开(公告)日: 2010-02-04
- 发明人: Roberto B. Wiener , Pradeep K. Govil , Michael Emerson Brown
- 申请人: Roberto B. Wiener , Pradeep K. Govil , Michael Emerson Brown
- 申请人地址: NL Veldhoven
- 专利权人: ASML Holding N.V.
- 当前专利权人: ASML Holding N.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: G03B27/52
- IPC分类号: G03B27/52 ; H05K7/20
摘要:
In order to effectively transfer heat from inner layers of an actuator coil to an area external to the coil, heat transfer elements, located proximate to the actuator coil, can be used. In an embodiment, a heat transfer apparatus for the actuator coil can include one or more heat transfer elements located proximate to one or more layers or one or more windings of the actuator coil and a cooling surface located proximate to the one or more heat transfer elements and to the actuator coil. In this configuration, the heat transfer apparatus can transfer heat from inner layers of the actuator coil to the cooling surface, which in turn transfers the heat to an area external to the actuator coil.
公开/授权文献
- US08982317B2 Cooling of actuator coils 公开/授权日:2015-03-17
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