发明申请
US20100032742A1 INTEGRATED CIRCUITS COMPRISING AN ACTIVE TRANSISTOR ELECTRICALLY CONNECTED TO A TRENCH CAPACITOR BY AN OVERLYING CONTACT AND METHODS OF MAKING
有权
包含通过过度接触电路连接到TRENCH电容器的有源晶体管的集成电路和制造方法
- 专利标题: INTEGRATED CIRCUITS COMPRISING AN ACTIVE TRANSISTOR ELECTRICALLY CONNECTED TO A TRENCH CAPACITOR BY AN OVERLYING CONTACT AND METHODS OF MAKING
- 专利标题(中): 包含通过过度接触电路连接到TRENCH电容器的有源晶体管的集成电路和制造方法
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申请号: US12186780申请日: 2008-08-06
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公开(公告)号: US20100032742A1公开(公告)日: 2010-02-11
- 发明人: John E. Barth, JR. , Kangguo Cheng , Michael Sperling , Geng Wang
- 申请人: John E. Barth, JR. , Kangguo Cheng , Michael Sperling , Geng Wang
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/8242
摘要:
A method of forming an integrated circuit comprises: providing a semiconductor topography comprising an active transistor laterally adjacent to a trench capacitor formed in a semiconductor substrate, the active transistor comprising a source junction and a drain junction, wherein a barrier layer is disposed along a periphery of the trench capacitor for isolating the trench capacitor; forming an interlevel dielectric across the semiconductor topography; concurrently etching (i) a first opening through the interlevel dielectric to the drain junction of the active transistor and the trench capacitor, and (ii) a second opening through the interlevel dielectric to the source junction of the active transistor; and filling the first opening and the second opening with a conductive material to form a strap for electrically connecting the trench capacitor to the drain junction of the active transistor and to also form a contact for electrically connecting the source junction to an overlying level of the integrated circuit.
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