Invention Application
US20100032761A1 SEMICONDUCTOR STRUCTURE INCLUDING A HIGH PERFORMANCE FET AND A HIGH VOLTAGE FET ON A SOI SUBSTRATE 有权
在SOI衬底上包括高性能FET和高电压FET的半导体结构

SEMICONDUCTOR STRUCTURE INCLUDING A HIGH PERFORMANCE FET AND A HIGH VOLTAGE FET ON A SOI SUBSTRATE
Abstract:
A first field effect transistor includes a gate dielectric and a gate electrode located over a first portion of a top semiconductor layer in a semiconductor-on-insulator (SOI) substrate. A second field effect transistor includes a portion of a buried insulator layer and a source region and a drain region located underneath the buried insulator layer. In one embodiment, the gate electrode of the second field effect transistor is a remaining portion of the top semiconductor layer. In another embodiment, the gate electrode of the second field effect transistor is formed concurrently with the gate electrode of the first field effect transistor by deposition and patterning of a gate electrode layer. The first field effect transistor may be a high performance device and the second field effect transistor may be a high voltage device. A design structure for the semiconductor structure is also provided.
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