发明申请
US20100033063A1 PIEZOELECTRIC THIN0FILM RESONATOR, FILTER USING THE SAME, AND DUPLEXER USING THE SAME
有权
压电薄膜谐振器，使用该滤波器的滤波器和使用它的双工器
- 专利标题： PIEZOELECTRIC THIN0FILM RESONATOR, FILTER USING THE SAME, AND DUPLEXER USING THE SAME
- 专利标题（中）： 压电薄膜谐振器，使用该滤波器的滤波器和使用它的双工器
-
申请号： US12535186申请日： 2009-08-04
-
公开(公告)号： US20100033063A1公开(公告)日： 2010-02-11
- 发明人: Tokihiro Nishihara , Motoaki Hara , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masafumi Iwaki , Masanori Ueda
- 申请人： Tokihiro Nishihara , Motoaki Hara , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masafumi Iwaki , Masanori Ueda
- 申请人地址： JP Kawasaki
- 专利权人： FUJITSU LIMITED
- 当前专利权人： FUJITSU LIMITED
- 当前专利权人地址： JP Kawasaki
- 优先权： JP2008-206089 20080808
- 主分类号： H01L41/047
- IPC分类号： H01L41/047
摘要：
A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode formed on the piezoelectric film, the lower electrode and the upper electrode opposing each other through the piezoelectric film to form an opposing region, the opposing region including a space at a boundary of the opposing region. The space extends from an innerside to an outer side of the opposing region and is formed in or on the piezoelectric film.