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    Piezoelectric thin-film resonator and method for manufacturing the same
    1.
    发明授权
    Piezoelectric thin-film resonator and method for manufacturing the same 有权
    压电薄膜谐振器及其制造方法

    公开(公告)号：US09035536B2

    公开(公告)日：2015-05-19

    申请号：US13563505

    申请日：2012-07-31

    申请人： Masanori Ueda ,  Shinji Taniguchi ,  Tokihiro Nishihara

    发明人： Masanori Ueda ,  Shinji Taniguchi ,  Tokihiro Nishihara

    IPC分类号： H01L41/09 ,  H03H3/04 ,  H03H9/17 ,  H03H3/02

    CPC分类号： H03H3/04 ,  H03H9/171 ,  H03H2003/021 ,  H03H2003/023 ,  H03H2003/025 ,  H03H2003/0407 ,  Y10T29/42

    摘要： A piezoelectric thin-film resonator includes: a lower electrode provided on a substrate; a piezoelectric film that is provided on the lower electrode and includes at least two layers; an upper electrode that is provided on the piezoelectric film and has a region sandwiching the piezoelectric film with the lower electrode and facing the lower electrode; and an insulating film that is provided in a region in which the lower electrode and the upper electrode face each other and between each of the at least two layers, wherein an upper face of the insulating film is flatter than a lower face of the insulating film.

    摘要翻译： 压电薄膜谐振器包括：设置在基板上的下电极; 压电膜，其设置在所述下电极上并且包括至少两层; 上部电极，其设置在所述压电膜上，并且具有将所述压电膜与所述下部电极夹在中间且与所述下部电极相对的区域; 以及绝缘膜，其设置在所述下电极和所述上电极彼此面对并且在所述至少两层中的每一个之间的区域中，其中所述绝缘膜的上表面比所述绝缘膜的下表面平坦 。

    Acoustic wave device
    3.
    发明授权
    Acoustic wave device 有权
    声波装置

    公开(公告)号：US08841819B2

    公开(公告)日：2014-09-23

    申请号：US13240407

    申请日：2011-09-22

    申请人： Tokihiro Nishihara ,  Shinji Taniguchi ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita

    发明人： Tokihiro Nishihara ,  Shinji Taniguchi ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita

    IPC分类号： H03H9/54 ,  H01L41/09 ,  H03H9/58

    CPC分类号： H03H9/584 ,  H03H9/587 ,  H03H9/589

    摘要： An acoustic wave device includes: a first piezoelectric thin film resonator including a first lower electrode, a first upper electrode and a first piezoelectric film sandwiched between the first lower and upper electrodes; a decoupler film provided on the first upper electrode; and a second piezoelectric thin film resonator provided on the decoupler film and including a second lower electrode, a second upper electrode and a second piezoelectric film sandwiched between the second lower and upper electrodes, wherein the first piezoelectric film and the second piezoelectric film comprise aluminum nitride and include an element increasing a piezoelectric constant of the aluminum nitride.

    摘要翻译： 声波装置包括：第一压电薄膜谐振器，包括第一下电极，第一上电极和夹在第一下电极和上电极之间的第一压电薄膜; 设置在第一上电极上的去耦膜; 以及第二压电薄膜谐振器，其设置在所述去耦膜上并且包括夹在所述第二下电极和上电极之间的第二下电极，第二上电极和第二压电薄膜，其中所述第一压电薄膜和所述第二压电薄膜包括氮化铝 并且包括增加氮化铝的压电常数的元素。

    Film bulk acoustic resonator, filter, communication module and communication apparatus
    5.
    发明授权
    Film bulk acoustic resonator, filter, communication module and communication apparatus 有权
    薄膜体声共振器，滤波器，通信模块和通信装置

    公开(公告)号：US08653908B2

    公开(公告)日：2014-02-18

    申请号：US12921150

    申请日：2008-03-04

    申请人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

    发明人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

    IPC分类号： H03H9/54

    CPC分类号： H03H9/174 ,  H03H3/02 ,  H03H9/02118 ,  H03H9/173 ,  H03H2003/021 ,  H03H2003/023

    摘要： A piezoelectric thin film resonator of the present has a substrate 1, an intermediate layer 7 disposed on the substrate 1 and is formed of an insulator, a lower electrode 3 disposed on the intermediate layer 7, a piezoelectric film 4 disposed on the lower electrode 3, and an upper electrode 5 disposed on a position facing the lower electrode 3 with the piezoelectric film 4 interposed therebetween, in which, in a resonant region 8 where the lower electrode 3 and the upper electrode 5 face each other, a space 6 is formed in the substrate 1 and the intermediate layer 7 or between the lower electrode 3 and the intermediate layer 7 and the region of the space 6 is included in the resonant region 8. With the structure, the dissipation of the vibrational energy to the substrate from the resonance portion can be suppressed, thereby improving the quality factor.

    摘要翻译： 本发明的压电薄膜谐振器具有基板1，设置在基板1上并由绝缘体形成的中间层7，设置在中间层7上的下部电极3，设置在下部电极3上的压电膜4 以及设置在面向下电极3的位置上的上电极5，其间插入压电膜4，其中在下电极3和上电极5彼此面对的谐振区域8中形成有空间6 在基板1和中间层7中，或在下部电极3和中间层7之间，并且空间6的区域包含在谐振区域8中。通过这种结构，振动能量从基板 可以抑制共振部分，从而提高质量因素。

    Lamp lighting device and filament lamp
    6.
    发明授权
    Lamp lighting device and filament lamp 有权
    灯具照明装置和灯丝灯

    公开(公告)号：US08476848B2

    公开(公告)日：2013-07-02

    申请号：US12794884

    申请日：2010-06-07

    申请人： Shinji Taniguchi

    发明人： Shinji Taniguchi

    IPC分类号： H05B39/10

    CPC分类号： H01K1/60 ,  H01K1/38 ,  H01K7/00 ,  H01K9/08 ,  H05B3/0047

    摘要： For providing a lamp lighting device and a filament lamp wherein a wire breakage of the filament lamp can be detected without an excessive consumption of power while the device as a whole is not enlarged, a filament lamp is provided comprising a light emission tube having at least one sealing portion and in the interior of which at least one filament is arranged, internal leads connected to both ends of said filament, metal foils for power supply provided in said at least one sealing portion of the light emission tube and connected to said internal leads, and external leads connected to said metal foils for power supply; wherein a metal foil for detection is provided in said sealing portion and is connected to one of a said internal lead and a said metal foil for power supply, and an external detection lead is provided at said metal foil for detection.

    摘要翻译： 为了提供灯照明装置和灯丝灯，其中在整个装置不扩大的情况下，可以检测到灯丝灯的断线而不会过度消耗功率，提供了一种灯丝灯，其包括至少具有发光管 一个密封部分，并且在其内部布置有至少一个细丝，连接到所述细丝两端的内部引线，用于供电的金属箔，设置在所述发光管的所述至少一个密封部分中并连接到所述内部引线 和连接到所述金属箔供电的外部引线; 其特征在于，在所述密封部设置有用于检测的金属箔，并与所述内部引线和所述金属箔中的一个电连接，并且在所述金属箔上设置外部检测用引线用于检测。

    Acoustic wave device with frequency control film
    7.
    发明授权
    Acoustic wave device with frequency control film 有权
    具有频率控制膜的声波装置

    公开(公告)号：US08344590B2

    公开(公告)日：2013-01-01

    申请号：US13431642

    申请日：2012-03-27

    申请人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Tokihiro Nishihara ,  Masanori Ueda

    发明人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Tokihiro Nishihara ,  Masanori Ueda

    IPC分类号： H01L41/04 ,  H03H9/205

    CPC分类号： H03H9/173 ,  H03H3/04 ,  H03H9/131 ,  H03H9/132 ,  H03H9/568 ,  H03H9/605 ,  H03H2003/0471

    摘要： An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. The sub resonator has a mass addition film on the upper electrode in a resonance area in which the upper electrode and the lower electrode face each other. At least one of the main resonator and the sub resonator is provided with a frequency control film on an upper side of the resonance area, and the frequency control film has a weight per unit area smaller than a weight of the mass addition film per unit area.

    摘要翻译： 声波装置包括主谐振器和子谐振器，每个具有基板，设置在基板上的下电极，设置在下电极上的压电膜和设置在压电膜上侧的上电极。 副谐振器在上电极和上电极彼此面对的共振区域中的上电极上具有质量加成膜。 主谐振器和副谐振器中的至少一个在谐振区域的上侧设置有频率控制膜，频率控制膜的每单位面积的重量比单位面积的质量加成膜的重量小 。

    Method of manufacturing thin film resonator
    9.
    发明授权
    Method of manufacturing thin film resonator 有权
    制造薄膜谐振器的方法

    公开(公告)号：US08240015B2

    公开(公告)日：2012-08-14

    申请号：US12627412

    申请日：2009-11-30

    申请人： Takeshi Sakashita ,  Motoaki Hara ,  Masafumi Iwaki ,  Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Tokihiro Nishihara ,  Masanori Ueda

    发明人： Takeshi Sakashita ,  Motoaki Hara ,  Masafumi Iwaki ,  Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Tokihiro Nishihara ,  Masanori Ueda

    IPC分类号： H04R17/10 ,  H01L41/22 ,  B05D5/12

    CPC分类号： H03H9/174 ,  H03H3/02 ,  H03H9/02118 ,  H03H9/132 ,  H03H9/173 ,  H03H9/605 ,  H03H9/706 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49156

    摘要： A method of producing a piezoelectric thin film resonator is provided. A sacrificial layer is formed on a part of the piezoelectric film. The sacrificial layer is patterned, and thereafter an upper electrode is formed on the piezoelectric layer. The method further includes removing the sacrificial layer formed on the piezoelectric layer; and patterning the piezoelectric film. In the step of removing the sacrificial layer, the sacrificial layer is removed such that at least a portion of the periphery of the upper electrode has a reversely tapered shape that reflects the tapered portion of the sacrificial layer, and in the step of patterning the piezoelectric film, the piezoelectric film is removed such that a lower end of the reversely tapered periphery of the upper electrode is placed so as to coincide with or to be in the vicinity of an end portion of the patterned piezoelectric film.

    摘要翻译： 提供了一种制造压电薄膜谐振器的方法。 在压电膜的一部分上形成牺牲层。 将牺牲层图案化，然后在压电层上形成上电极。 该方法还包括去除形成在压电层上的牺牲层; 并构图压电膜。 在去除牺牲层的步骤中，去除牺牲层，使得上电极的周边的至少一部分具有反映牺牲层的锥形部分的倒锥形形状，并且在图案化压电 膜，去除压电膜，使得上电极的倒锥形周边的下端被放置成与图案化压电膜的端部一致或靠近。

    Filter, duplexer, and communication apparatus
    10.
    发明授权
    Filter, duplexer, and communication apparatus 有权
    滤波器，双工器和通信设备

    公开(公告)号：US08125297B2

    公开(公告)日：2012-02-28

    申请号：US12512794

    申请日：2009-07-30

    申请人： Masafumi Iwaki ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Motoaki Hara ,  Masanori Ueda

    发明人： Masafumi Iwaki ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Motoaki Hara ,  Masanori Ueda

    IPC分类号： H03H9/70 ,  H03H9/54 ,  H03H9/64 ,  H03H9/72

    CPC分类号： H03H9/725 ,  H03H7/18 ,  H03H9/706

    摘要： A filter includes: a first filter unit includes: a series resonators connected in series to each other between a first input terminal and a first output terminal; a parallel resonators each having one end connected to one terminal of each of the series resonators; and a common inductance having one end connected to the other ends of the parallel resonators and the other end connected to a ground terminal, and a second filter unit includes: a series resonators connected in series to each other between a second input terminal and a second output terminal; a parallel resonators each having one end connected to one terminal of each of the series resonators; and a common inductance having one end connected to the other ends of the parallel resonators and the other end connected to the ground terminal.

    摘要翻译： 滤波器包括：第一滤波器单元，包括：在第一输入端和第一输出端之间彼此串联连接的串联谐振器; 每个并联谐振器的一端连接到每个串联谐振器的一个端子; 以及公共电感，其一端连接到并联谐振器的另一端并且另一端连接到接地端子，并且第二滤波器单元包括：在第二输入端子和第二输入端子之间彼此串联连接的串联谐振器 输出端子 每个并联谐振器的一端连接到每个串联谐振器的一个端子; 以及公共电感，其一端连接到并联谐振器的另一端，另一端连接到接地端子。