发明申请
US20100033812A1 SYSTEM AND METHOD FOR ADJUSTING THE SPHERICAL ABERRATION OF OBJECTIVE LENSES 有权
用于调整目标镜片的球面抛光的系统和方法

SYSTEM AND METHOD FOR ADJUSTING THE SPHERICAL ABERRATION OF OBJECTIVE LENSES
摘要:
A spherical aberration adjustment system is disclosed, which includes a plurality of objective lenses, where at least one of the plurality of objective lenses has a spherical aberration collar. The plurality of objective lenses are mounted onto an objective holder, where the objective holder is configured to place the at least one of the plurality of objective lenses in an imaging position. A driving mechanism is coupled by a mechanical link to the at least one of the plurality of objective lenses, where the mechanical link is configured to transmit motion from the driving mechanism to the spherical aberration collar. A control system is configured to manipulate the driving mechanism to move the spherical aberration collar of the at least one of the plurality of objective lenses in the imaging position to a specific spherical aberration adjustment setting.
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