发明申请
- 专利标题: METHOD FOR FORMING PATTERN, AND MATERIAL FOR FORMING COATING FILM
- 专利标题(中): 形成图案的方法和形成涂膜的材料
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申请号: US12443118申请日: 2007-09-13
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公开(公告)号: US20100035177A1公开(公告)日: 2010-02-11
- 发明人: Kiyoshi Ishikawa , Jun Koshiyama , Kazumasa Wakiya
- 申请人: Kiyoshi Ishikawa , Jun Koshiyama , Kazumasa Wakiya
- 申请人地址: JP Kanagawa
- 专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址: JP Kanagawa
- 优先权: JP2006-265115 20060928
- 国际申请: PCT/JP2007/067886 WO 20070913
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F7/004
摘要:
A novel method for forming a pattern capable of decreasing the number of steps in a double patterning process, and a material for forming a coating film suitably used in the method for forming a pattern are provided. First resist film (2) is formed by applying a first chemically amplified resist composition on support (1), and thus formed film is selectively exposed, and developed to form multiple first resist patterns (3). Next, on the surface of the first resist patterns (3) are formed multiple coating patterns (5) by forming coating films (4) constituted with a water soluble resin film, respectively. Furthermore, a second chemically amplified resist composition is applied on the support (1) having the coating pattern (5) formed thereon to form second resist film (6), which is selectively exposed and developed to form multiple second resist patterns (7). Accordingly, a pattern including the coating patterns (5) and the second resist patterns (7) is formed on the support (1).
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