发明申请
- 专利标题： Foreign Matter or Abnormal Unsmoothness Inspection Apparatus and Foreign Matter or Abnormal Unsmoothness Inspection Method
- 专利标题（中）： 异物或非正常不平整检查装置及异物检查方法
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申请号： US12606256申请日： 2009-10-27
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公开(公告)号： US20100038531A1公开(公告)日： 2010-02-18
- 发明人: Kazuhiro Jindai , Hideto Yokoi
- 申请人： Kazuhiro Jindai , Hideto Yokoi
- 申请人地址： JP Tokyo
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2007-051586 20070301
- 主分类号： H01J49/26
- IPC分类号： H01J49/26 ; G01N3/48
摘要：
A foreign matter detecting apparatus includes a detecting device for detecting foreign matter by measuring smoothness of a surface of an object undergoing measurement, a marking device for providing a dent on the surface of the object with a predetermined horizontal distance from the foreign matter detected by the detecting device, and a mass spectrum measuring device for irradiating and scanning a small area with a primary ion beam, as a part of the object, including the foreign matter and the dent, so as to measure a mass spectrum of secondary ions emitted from the foreign matter located at a position within a predetermined horizontal distance from the dent.
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