发明申请
- 专利标题： HOT CATHODE AND ION SOURCE INCLUDING THE SAME
- 专利标题（中）： 热阴极和离子源包括它
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申请号： US12511660申请日： 2009-07-29
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公开(公告)号： US20100038556A1公开(公告)日： 2010-02-18
- 发明人: Naoki Miyamoto
- 申请人： Naoki Miyamoto
- 申请人地址： JP Kyoto
- 专利权人： NISSIN ION EQUIPMENT CO., LTD.
- 当前专利权人： NISSIN ION EQUIPMENT CO., LTD.
- 当前专利权人地址： JP Kyoto
- 优先权： JP2008-209814 20080818
- 主分类号： H01J27/00
- IPC分类号： H01J27/00 ; H01J9/02
摘要：
A hot cathode includes: a hollow external conductor; a hollow internal conductor which is placed coaxially inside the external conductor; and a connection conductor which electrically connects tip end portions of the conductors. A heating current is folded back through the connection conductor to flow in opposite directions in the external conductor and the internal conductor.
公开/授权文献
- US08188645B2 Hot cathode and ion source including the same 公开/授权日：2012-05-29
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