发明申请
- 专利标题： Adjustable dummy fill
- 专利标题（中）： 可调式虚拟填充
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申请号： US12460602申请日： 2009-07-21
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公开(公告)号： US20100041232A1公开(公告)日： 2010-02-18
- 发明人: Scott R. Summerfelt , Robert G. Fleck
- 申请人： Scott R. Summerfelt , Robert G. Fleck
- 主分类号： H01L21/3205
- IPC分类号： H01L21/3205 ; H01L21/02
摘要：
A method of placing a dummy fill layer on a substrate is disclosed (FIG. 2). The method includes identifying a sub-region of the substrate (210). A density of a layer in the sub-region is determined (212). A pattern of the dummy fill layer is selected to produce a predetermined density (216). The selected pattern is placed in the sub-region (208).
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